2003 IEEE International Symposium on Industrial Electronics ( Cat. No.03TH8692)
DOI: 10.1109/isie.2003.1267947
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Development of electrostatic levitation motor for vacuum condition

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Cited by 5 publications
(3 citation statements)
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“…Como elétrica, pode-se conceber uma situação em que cargas elétricas de mesma polaridade estão dispostas frente a frente e.g. [3,4].…”
Section: Levitaçãounclassified
“…Como elétrica, pode-se conceber uma situação em que cargas elétricas de mesma polaridade estão dispostas frente a frente e.g. [3,4].…”
Section: Levitaçãounclassified
“…However, recent studies have shown that the electrostatic machine could be designed large enough for industrial sizes which are dominated by electromagnetic machines. In [1], a direct drive high power electrostatic linear synchronous motor was reported with a power per weight ratio of 230W /kg and acceleration of over 100G in dielectric liquid. The control method for levitation and propulsion was discussed for the prototype which adopts dual excitation multi phase configurations.…”
Section: Introductionmentioning
confidence: 99%
“…These equipments include electron beam lithography systems and scanning electron microscopes. For these applications, an electrostatic levitation motor based on the DEMED technology was proposed [14].…”
Section: Introductionmentioning
confidence: 99%