Development of CVD Ti-containing films

Jin, Na; Yang, Yanqing; X, Luo; Xia, Zhaoqiang

doi:10.1016/j.pmatsci.2013.07.001

Cited by 37 publications

(9 citation statements)

References 224 publications

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“…Even on complex shapes, uniform nanocrystalline films with good step coverage can be deposited. At the same time, films prepared using the CVD method usually show better adhesion and higher internal stress [8]. In addition, at low deposition temperature and within a short time, CVD technology can well control the size and structure of the coating --single layer coating, multi-layer coating, composite coating, nanostructure and functional gradient coating [9].…”

Section: Chemical Vapor Deposition Techniquementioning

confidence: 99%

Advances in Preparation Technology of Tool Coatings

Ouyang¹

2023

AJST

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With the continuous development of modern industry and the difficult-to-machine materials gradually increases, the machining requirements of cutting tools continue to improve and the cutting environment is increasingly harsh. As the coating applies, the efficiency and precision of machining have been effectively improved. Coating on the tool surface can not only extend the service life of the cutting tool, greatly reduce the processing cost, but also reduce the environmental pollution in the process of processing. Excellent coating preparation technology is an important factor for its effective performance. According to different processing requirements, processing costs and processing environment, researchers have been working hard on the road of coating preparation technology. In this work, it summarizes the principle of physical vapor deposition, chemical vapor deposition and the corresponding advantages and disadvantages, and briefly introduces the pulsed DC magnetron sputtering, high power pulsed magnetron sputtering, arc ion plating and a variety of composite magnetron sputtering technologies.

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Section: Chemical Vapor Deposition Techniquementioning

confidence: 99%

Advances in Preparation Technology of Tool Coatings

Ouyang¹

2023

AJST

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“…In recent decades, even inorganic coatings can be produced through CVD technologies. Moreover, these methods can be used to purify various substances and precipitates, single-crystal, polycrystalline, and other inorganic thin-film materials ( Jin et al, 2013 ; Manawi et al, 2018 ). Based on the influential parameters and chemical interactions, CVD methods can be divided into ambient pressure ( Jang et al, 2015 ), low-pressure ( Gao et al, 2011 ; Umrao et al, 2017 ), thermal ( Zeng et al, 2018 ), ultra-high vacuum ( Multone et al, 2008 ), and organic metal CVD methods ( Maury and Senocq, 2003 ; Gong et al, 2013 ).…”

Section: Preparation Of Nanostructure On Titanium and Its Alloysmentioning

confidence: 99%

Nano-Modified Titanium Implant Materials: A Way Toward Improved Antibacterial Properties

Liu

Attarilar

et al. 2020

Front. Bioeng. Biotechnol.

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“…At present, surface modification of the titanium LGDLs can effectively improve the corrosion resistance, electrical conductivity and ensure the service life [ 22 , 23 ]. There have been many studies on the surface modification of titanium LGDLs to form dense coatings with high conductivity and high corrosion resistance, such as tantalum [ 24 ], ceramic materials, e.g., titanium nitride [ 22 , 25 ] and titanium carbide [ 26 ] produced via various methods, e.g., physical vapor deposition (PVD) [ 27 , 28 ], chemical vapor deposition (CVD) [ 29 ], etc. Even though good corrosion resistance and high conductivity have been achieved for the above-mentioned coatings, the production processes and the complicated equipment required makes it complex, and the modified Ti LGDLs were prone to be oxidized during the long-term use [ 26 ].…”

Section: Introductionmentioning

confidence: 99%

Au-TiO2/Ti Hybrid Coating as a Liquid and Gas Diffusion Layer with Improved Performance and Stability in Proton Exchange Membrane Water Electrolyzer

et al. 2022

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The liquid and gas diffusion layer is a key component of proton exchange membrane water electrolyzer (PEMWE), and its interfacial contact resistance (ICR) and corrosion resistance have a great impact on the performance and durability of PEMWE. In this work, a novel hybrid coating with Au contacts discontinuously embedded in a titanium oxidized layer was constructed on a Ti felt via facile electrochemical metallizing and followed by a pre-oxidization process. The physicochemical characterizations, such as scanning electron microscopy, energy dispersive spectrometer, and X-ray diffraction results confirmed that the distribution and morphology of the Au contacts could be regulated with the electrical pulse time, and a hybrid coating (Au-TiO2/Ti) was eventually achieved after the long-term stability test under anode environment. At the compaction force of 140 N cm−2, the ICR was reduced from 19.7 mΩ cm2 of the P-Ti to 4.2 mΩ cm2 of the Au-TiO2/Ti. The corrosion current density at 1.8 V (RHE) is 0.689 μA cm−2. Both the ICR and corrosion resistance results showed that the prepared protective coating could provide comparable ICR and corrosion resistance to a dense Au coating.

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Development of CVD Ti-containing films

Cited by 37 publications

References 224 publications

Advances in Preparation Technology of Tool Coatings

Advances in Preparation Technology of Tool Coatings

Nano-Modified Titanium Implant Materials: A Way Toward Improved Antibacterial Properties

Au-TiO2/Ti Hybrid Coating as a Liquid and Gas Diffusion Layer with Improved Performance and Stability in Proton Exchange Membrane Water Electrolyzer

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