Development of confocal 3D micro‐XRF spectrometer with dual CrMo excitation

Abstract

A new 3D micro‐XRF instrument based on a confocal setup using two independent polycapillary x‐ray lenses and two x‐ray sources (Cr and Mo targets) was developed. A full polycapillary x‐ray lens was attached to each x‐ray tube. Another half polycapillary lens was attached to a silicon drift x‐ray detector (SDD). The focal spots of the three lenses were adjusted to a common position. The depth resolutions that were evaluated by use of a 10‐µm thick Au foil were approximately 90 µm for the x‐ray energy of Au Lα. The effects of the dual Cr–Mo x‐ray beam excitation were investigated. It was confirmed that the XRF intensity of light elements was increased by applying the Cr‐target x‐ray tube in a confocal configuration. In the proposed confocal configuration, 3D elemental mapping of the major elements of an amaranth seed was performed nondestructively at ambient air pressure. Each element of the seed showed different mapping images in the different depth layers. Copyright © 2007 John Wiley & Sons, Ltd.

Application of Confocal 3D Micro-XRF for Solid/Liquid Interface Analysis

“…[9][10][11] We developed 3D-XRF with dual x-ray beam excitation. However, an ordinary 3D-XRF apparatus with a single x-ray tube (Mo target) was applied for this experiment, because the area near the sample holder was limited for placing the plastic case of a sample solution.…”

“…[8][9][10] We confirmed highly effective excitation for light elements by applying a Cr target. 11 The 3D-XRF method has been applied for the analysis of various samples, such as paint chips, 12 layered materials, 13 particles in a BN matrix, 7 and Amaranth seed. 11 However, as far as we know, 3D-XRF has not been applied for the analysis of solid/liquid interfaces.…”

“…11 The 3D-XRF method has been applied for the analysis of various samples, such as paint chips, 12 layered materials, 13 particles in a BN matrix, 7 and Amaranth seed. 11 However, as far as we know, 3D-XRF has not been applied for the analysis of solid/liquid interfaces. The present paper reports on laboratory 3D-XRF results applied for the analysis of solid/liquid interfaces.…”

Laboratory-based micro-X-ray fluorescence setup using a von Hamos crystal spectrometer and a focused beam X-ray tube

“…39 Typical application domains for polycapillary optics are μ-XRF, absorption, or diffraction experiments with the aim to realize spatially resolved measurements, to increase the detection efficiency, 35,36,40,41 or to optimize the background conditions by shielding the detector from scattered particles or X-ray radiation. 37,40 Arranged in the confocal geometry, [42][43][44][45][46][47][48] 3D-measurements with micrometer resolution can also be realized. In general, the advantages offered by polycapillary optics are the compact size, the spatial acceptance of the incoming X-ray beam, and a broad usable energy range.…”

Elemental Depth Analysis of Corroded Paint-Coated Steel by Confocal Micro-XRF Method

“…[7][8][9][10] In addition, our research group recently developed a new confocal micro-XRF instrument using advanced polycapillary x-ray lenses with a depth resolution of 14 mm at an energy of 11.4 keV (AuLβ ).…”