Development of Band-Limitless Demodulation Method for Sinusoidal Phase Modulation Interferometry (Evaluation of Noise Floors, Maximum Measurement Speeds and Resolutions)

HIGUCHI, Masato; KATAGIRI, Katsunari; NAKAGAWA, Takehiro; SATO, Taku; AKETAGAWA, Masato

doi:10.2493/jjspe.90.153

Journal of the Japan Society for Precision Engineering

2024

DOI: 10.2493/jjspe.90.153

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Development of Band-Limitless Demodulation Method for Sinusoidal Phase Modulation Interferometry (Evaluation of Noise Floors, Maximum Measurement Speeds and Resolutions)

Masato HIGUCHI,

Katsunari KATAGIRI,

Takehiro NAKAGAWA

et al.

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Development of Band-Limitless Demodulation Method for Sinusoidal Phase Modulation Interferometry (Evaluation of Noise Floors, Maximum Measurement Speeds and Resolutions)

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References 16 publications

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