Development of an optical accelerometer for low-frequency vibration using the voice coil on a DVD pickup head

Liu, Yicheng; Fan, Kuang‐Chao; Chu, Chih‐Liang; Werner, Christian Andreas; Jäger, Gerd

doi:10.1088/0957-0233/19/8/084012

Cited by 28 publications

(14 citation statements)

References 22 publications

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“…In general, the accelerometer is calibrated by the recording of its output under a particular excitation force and then a comparison of this output with that generated by a reference accelerometer under the same excitation conditions [ 26 ]. This type of calibration is known as the comparative method.…”

Section: Experimental Setup and Measurement Resultsmentioning

confidence: 99%

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Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Lei

Chang

et al. 2018

Sensors

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Low-frequency vibration is a harmful factor that affects the accuracy of micro/nano-measuring machines. Low-frequency vibration cannot be completely eliminated by passive control methods, such as the use of air-floating platforms. Therefore, low-frequency vibrations must be measured before being actively suppressed. In this study, the design of a low-cost high-sensitivity optical accelerometer is proposed. This optical accelerometer mainly comprises three components: a seismic mass, a leaf spring, and a sensing component based on a four-quadrant photodetector (QPD). When a vibration is detected, the seismic mass moves up and down due to the effect of inertia, and the leaf spring exhibits a corresponding elastic deformation, which is amplified by using an optical lever and measured by the QPD. Then, the acceleration can be calculated. The resonant frequencies and elastic coefficients of various seismic structures are simulated to attain the optimal detection of low-frequency, low-amplitude vibration. The accelerometer is calibrated using a homemade vibration calibration system, and the calibration experimental results demonstrate that the sensitivity of the optical accelerometer is 1.74 V (m·s−2)−1, the measurement range of the accelerometer is 0.003–7.29 m·s−2, and the operating frequencies range of 0.4–12 Hz. The standard deviation from ten measurements is under 7.9 × 10−4 m·s−2. The efficacy of the optical accelerometer in measuring low-frequency, low-amplitude dynamic responses is verified.

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Section: Experimental Setup and Measurement Resultsmentioning

confidence: 99%

“…Several accelerometers were developed based on the high precision displacement or angle sensor modified from DVD pick up head [ 25 , 26 , 27 ]. These optical accelerometers have high sensitivity and enable low amplitude vibration detection.…”

Section: Introductionmentioning

confidence: 99%

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Lei

Chang

et al. 2018

Sensors

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“…The accelerometer is calibrated by a comparative method [19]. The output signals from the accelerometer and a reference are recorded synchronously and compared when a particular excitation is applied.…”

Section: Methodsmentioning

confidence: 99%

“…Capacitive accelerometers have much higher sensitivity and cost than piezoelectric accelerometers. The second type is the accelerometers based on optoelectronic sensors, such as fiber Bragg grating (FBG) [12]- [17], focus probe [18], [19] and position detector [20]. The sensitivity and the minimum sensing frequency of the FBG accelerometer can reach 0.362 V/g and 1 Hz respectively [14].…”

Section: Introductionmentioning

confidence: 99%

“…The sensitivity and the minimum sensing frequency of the FBG accelerometer can reach 0.362 V/g and 1 Hz respectively [14]. Chu et al [18] and Liu et al [19] proposed a new optical accelerometer based on a focus probe modified from DVD pick-up head. These optical accelerometers have high precision, are low cost, and enable the detection of low-amplitude vibrations.…”

Section: Introductionmentioning

confidence: 99%

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A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

Chang

Lei

et al. 2019

IEEE Photonics J.

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A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformation; the seismic mass will move up and down due to the effect of inertia, whose displacement can be detected by the focus probe. Therefore, the measured acceleration can be obtained. The accelerometer was designed, and its proper parameters were obtained. The accelerometer was calibrated and tested using a high-precision vibration generator. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 10.8 V/g, a resolution of 3.0 × 10 -4 g, and a working frequency range of 1-10 Hz. Also, the uncertainty of the accelerometer was analyzed in detail and an evaluation result of 7.0 × 10 -4 g (K = 2) was obtained. It can be used to detect the low-frequency microvibrations in high-precision measurement and machining fields.

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3-D measurement and evaluation of surface texture produced by scraping process

Fan¹,

Torng²,

Jywe³

et al. 2012

Measurement

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Development of an optical accelerometer for low-frequency vibration using the voice coil on a DVD pickup head

Cited by 28 publications

References 22 publications

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

3-D measurement and evaluation of surface texture produced by scraping process

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