Development of an integrated optical microphone by means of waveguide structuring on PMMA

Garthe, D.; Kobiela, Juergen; Kallweit, R.

doi:10.1117/12.162733

Cited by 2 publications

(3 citation statements)

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“…Figure 19: Shock analysis of a capacitive microphone of up to 80000g acceleration, in which (a) the whole membrane is missing and (b) most of the membrane is cracked [192]. Figure 20: Optical fiber intensity modulated microphones with (a) incident and reflected lights in a single-bundle fiber [196] and (b) incident and reflected lights separated by integrated waveguides [197]. 16 Journal of Sensors the noise issue in the two combined omnidirectional microphones [207].…”

Section: Directional Microphonesmentioning

confidence: 99%

“…This type of microphone is presented in [196], in which the incident and reflected lights are in the same fiber bundle placed near the cavity of the microphone, as shown in Figure 20(a). Another way is to place an integrated waveguide near the cavity to separate the paths of incident light and reflected lights, as shown in Figure 20(b) [197]. There are some advantages and disadvantages to the use of optical microphones.…”

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confidence: 99%

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Design Approaches of MEMS Microphones for Enhanced Performance

Shah

Lee

et al. 2019

Journal of Sensors

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This paper reports a review about microelectromechanical system (MEMS) microphones. The focus of this review is to identify the issues in MEMS microphone designs and thoroughly discuss the state-of-the-art solutions that have been presented by the researchers to improve performance. Considerable research work has been carried out in capacitive MEMS microphones, and this field has attracted the research community because these designs have high sensitivity, flat frequency response, and low noise level. A detailed overview of the omnidirectional microphones used in the applications of an audio frequency range has been presented. Since the microphone membrane is made of a thin film, it has residual stress that degrades the microphone performance. An in-depth detailed review of research articles containing solutions to relieve these stresses has been presented. The comparative analysis of fabrication processes of single- and dual-chip omnidirectional microphones, in which the membranes are made up of single-crystal silicon, polysilicon, and silicon nitride, has been done, and articles containing the improved performance in these two fabrication processes have been explained. This review will serve as a starting guide for new researchers in the field of capacitive MEMS microphones.

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Section: Directional Microphonesmentioning

confidence: 99%

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confidence: 99%

Design Approaches of MEMS Microphones for Enhanced Performance

Shah

Lee

et al. 2019

Journal of Sensors

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“…In addition, they can be deployed in environments too harsh for other microphone technologies. [5] However, optical microphones require an elaborate optical setup and optoelectronics to convert the optical signal to an electrical signal. Piezoresistive microphones can be very robust; in addition, their performance does not suffer due to parasitic capacitance.…”

Section: Introductionmentioning

confidence: 99%

Compliant membranes for the development of MEMS dual-backplate capacitive microphone using the SUMMiT V fabrication process.

Martin

2005

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The objective of this project is the investigation of compliant membranes for the development of a MicroElectrical Mechanical Systems (MEMS) microphone using the Sandia Ultraplanar, Multilevel MEMS Technology (SUMMiT V) fabrication process. The microphone is a dualbackplate capacitive microphone utilizing electrostatic force feedback. The microphone consists of a diaphragm and two porous backplates, one on either side of the diaphragm. This forms a capacitor between the diaphragm and each backplate. As the incident pressure deflects the diaphragm, the value of each capacitor will change, thus resulting in an electrical output. Feedback may be used in this device by applying a voltage between the diaphragm and the backplates to balance the incident pressure keeping the diaphragm stationary.The SUMMiT V fabrication process is unique in that it can meet the fabrication requirements of this project. All five layers of polysilicon are used in the fabrication of this device. The SUMMiT V process has been optimized to provide low-stress mechanical layers that are ideal for the construction of the microphone's diaphragm. The use of chemical mechanical polishing in the SUMMiT V process results in extremely flat structural layers and uniform spacing between the layers, both of which are critical to the successful fabrication of the MEMS microphone.The MEMS capacitive microphone was fabricated at Sandia National Laboratories and postprocessed, packaged, and tested at the University of Florida. The microphone demonstrates a flat frequency response, a linear response up to the designed limit, and a sensitivity that is close to the designed value. Future work will focus on characterization of additional devices, extending the frequency response measurements, and investigating the use of other types of interface circuitry. 3ACKNOWLEDGEMENT

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Development of an integrated optical microphone by means of waveguide structuring on PMMA

Cited by 2 publications

References 0 publications

Design Approaches of MEMS Microphones for Enhanced Performance

Design Approaches of MEMS Microphones for Enhanced Performance

Compliant membranes for the development of MEMS dual-backplate capacitive microphone using the SUMMiT V fabrication process.

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