Development of an industrial femtosecond laser micromachining system

Ostendorf, Andreas; Bauer, Thorsten; Korte, Frank; Howorth, Jonathon R.; Momma, C.; Rizvi, Nadeem Hasan; Saviot, F.; Salin, F.

doi:10.1117/12.461372

Cited by 22 publications

(10 citation statements)

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“…In the field of ultra-short pulses, the threshold for laser-induced damage of dielectric coatings has been studied by investigating their ablation effects in materials processing [1][2][3][4][5][6] . Beside the experimental determination of ablation thresholds for different dielectric materials, many publications dealt with theoretical models for a detailed understanding of the origin of laser-induced breakdown in this pulse duration regime [7][8][9][10][11] .…”

Section: Introductionmentioning

confidence: 99%

Nonlinear laser-induced damage and absorptance effects in dielectric coatings by using ultra-short pulses

et al. 2006

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The power handling capability of optical components is still one of the most important limitations for the further improvement of ultra-short pulse lasers in respect of average power and pulse energy. Laser-induced damage of functional dielectric coatings on laser crystals, pockels cells, out-coupling polarizers and compressor gratings is severely inhibiting the wide dispersion of ultra-short pulse laser systems especially in industrial production environments. Since the underlying physical causes for laser-induced damage with ultra-short pulses are distinctly differing from those in the nanosecond time scale, novel approaches must be found for an unambiguous improvement in damage resistance of optical coatings.In previous investigations, the band-gap of the coating material and the maximum field strength in the layer stack were identified as most important influences on the laser-induced damage with ultra-short pulses. Furthermore, a significant nonlinear increase of absorptance in dielectric coatings was found to be strongly related to the band-gap of the material. These effects were traced back to the multi-photon and avalanche-ionization as driving mechanisms for producing a critical conduction band population. In the current investigations, numerous model layer systems were investigated concerning laser-induced damage and non-linear absorptance. Adapting the ion beam sputtering coating process for achieving co-deposition of high and low index materials, coatings with continuously tunable refractive indices were produced. The results of the experiments exhibit a strong correlation of the damage threshold to the controllable shifting band-gaps of the coating materials.

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Section: Introductionmentioning

confidence: 99%

Nonlinear laser-induced damage and absorptance effects in dielectric coatings by using ultra-short pulses

et al. 2006

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“…There have been a few industrial applications where the high cost and slow process speeds have been justified. Cardiovascular implants (stents) used for the treatment of arteriosclerosis in coronary vessels are an excellent example where the clean, tight tolerance, smooth finish obtained by fs laser machining may be worth the extra processing time 13 . Bragg grating fabrication and three dimensional waveguide writing are other unique niche applications of fs lasers.…”

Section: Introductionmentioning

confidence: 99%

Glass processing using femtosecond and nanosecond pulsed lasers

Ozkan

Migliore

2003

SPIE Proceedings

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Laser processing of glass components is of significant commercial interest for the optoelectronics and telecommunications industries. Several fundamentally different interactions are employed to produce active components: after generating optical waveguides and gratings inside glass, external features must be machined in the modules to allow light to couple into the functional regions. In this paper, we present laser processing techniques using microsecond, nanosecond, and femtosecond lasers for surface and sub-surface glass modification. A regeneratively amplified Ti-Sapphire laser operating at a near-IR wavelength with femtosecond pulses and a 250 kHz repetition rate is used to generate 3-D optical waveguides and Bragg gratings in glass and silica substrates. Surface structures, mainly groove geometries, are generated with a diode-pumped solid-state nanosecond pulsed UV laser operating at 266 nm, a Q-switched CO 2 laser operating at 9.25 µm, a CO 2 laser operating at 10.6 µm and the femtosecond pulsed laser operating at 800 nm. The material interactions are examined with respect to the differences in time scale and the appropriateness of each laser type for particular processes.

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“…Since around 2000 the company Jobin & Yvon have also developed commercial elements [8]. With the development of Ti:sapphire industrial lasers for machining in the 800 nm wavelength range [9], new grating specifications have emerged such as high average power. This is as a consequence of higher repetition rates as well as the restricted bandwidth over which an ultimate diffraction efficiency can be reached in the 4-pass schemes currently used.…”

Section: Introductionmentioning

confidence: 99%

High-efficiency wide-band metal-dielectric resonant grating for 20 fs pulse compression

Flury¹,

Tonchev²,

Fechner³

et al. 2007

JEOS:RP

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More than 95% average efficiency TE-polarisation diffraction over a 200 nm wavelength range centred at 800 nm is obtained by a metaldielectric grating structure with non-corrugated mirror. 98% maximum -1 st order diffraction efficiency and a wide band top-hat spectrum are demonstrated experimentally opening the way to high-efficiency Chirped Pulse Amplification of femtosecond pulses as short as 20 fs.

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Development of an industrial femtosecond laser micromachining system

Cited by 22 publications

References 0 publications

Nonlinear laser-induced damage and absorptance effects in dielectric coatings by using ultra-short pulses

Nonlinear laser-induced damage and absorptance effects in dielectric coatings by using ultra-short pulses

Glass processing using femtosecond and nanosecond pulsed lasers

High-efficiency wide-band metal-dielectric resonant grating for 20 fs pulse compression

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