Development of AFM-based techniques to measure mechanical properties of nanoscale structures

Sundararajan, Sriram; Bhushan, Bharat

doi:10.1016/s0924-4247(02)00268-6

Cited by 193 publications

(94 citation statements)

References 26 publications

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“…Sundurarajan and Bhushan [25] were the first to determine the fatigue behavior of planes. For the fatigued specimens, smooth fracture surfaces were found, without facets or irregularities.…”

Section: Fatigue Test Results and Mechanisms For Single-crystal Silicmentioning

confidence: 99%

Mechanisms for Fatigue of Micron‐Scale Silicon Structural Films

et al. 2007

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SummaryAlthough bulk silicon is not susceptible to fatigue, micron-scale silicon is. Several mechanisms have been proposed to explain this surprising behavior although the issue remains contentious. Here we describe published fatigue results for micron-scale thin silicon films and find that in general they display similar trends, in that lower cyclic stresses result in larger number of cycles to failure in stress-lifetime data. We further show that one of two classes of mechanisms is invariably proposed to explain the phenomenon. The first class attributes fatigue to a surface effect caused by subcritical (stable) cracking in the silicon-oxide layer, e.g., reaction-layer fatigue; the second class proposes that subcritical cracking in the silicon itself is the cause of fatigue in Si films. It is our contention that results to date from single and poly crystalline silicon fatigue studies provide no convincing experimental evidence to support subcritical cracking in the silicon. Conversely, the reaction-layer mechanism is consistent with existing experimental results, and moreover provides a rational explanation for the marked difference in fatigue behavior of bulk and micron-scale silicon.

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Section: Fatigue Test Results and Mechanisms For Single-crystal Silicmentioning

confidence: 99%

Mechanisms for Fatigue of Micron‐Scale Silicon Structural Films

et al. 2007

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“…Many studies have shown a strong size or scale dependence for mechanical properties such as indentation hardness Bhushan 1998Bhushan , 1999aBhushan -c, 2007aNix & Gao 1998;Hutchinson 2000), tensile strength (Hutchinson 2000) and bending strength (Sundararajan & Bhushan 2002), indicating that the bulk properties of many materials differ from those on the micro/nanoscale. The scale invariance of the theory of linear elasticity and the conventional plasticity theories has lead to the formulation of the strain-gradient plasticity theory (Fleck et al 1994;Nix & Gao 1998;Gao et al 1999;Huang et al 2000;Hutchinson 2000).…”

Section: Friction and Wear Mechanisms On Nanoscale And Comparison Witmentioning

confidence: 99%

Nanoscale friction and wear maps

Tambe¹,

Bhushan

2007

Phil. Trans. R. Soc. A.

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Friction and wear are part and parcel of all walks of life, and for interfaces that are in close or near contact, tribology and mechanics are supremely important. They can critically influence the efficient functioning of devices and components. Nanoscale friction force follows a complex nonlinear dependence on multiple, often interdependent, interfacial and material properties. Various studies indicate that nanoscale devices may behave in ways that cannot be predicted from their larger counterparts. Nanoscale friction and wear mapping can help identify some 'sweet spots' that would give ultralow friction and near-zero wear. Mapping nanoscale friction and wear as a function of operating conditions and interface properties is a valuable tool and has the potential to impact the very way in which we design and select materials for nanotechnology applications.

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“…In distance less than few micrometers, Casimir force significantly affects the nano-beams stability. Casimir force between two plates can be explained via electromagnetic quantum vacuum fluctuations and motion of virtual photons between two conductive surfaces (Lifshitz, 1956) .In recent years, various approaches such as experimental measurements (Buks et al, 2001a;2001b), using finite element methods (Moghimi Zand et al, 2010;Tadi Beni et al, 2013), experimental observations (Wilson and Beck, 1996;Sundararajan and Bhushan, 2002), applying classic continuum theory (Ramezani et al, 2008;2007;Farrokhabadi et al, 2013;, semi-analytical approaches Koochi and Abadyan 2011;Duan et al, 2013) are utilized to investigate the effect of Casimir force on performance of nano-systems. Another dispersion force that is dominant in nano-scales is the vdW force that affects the stability of nano-structures.…”

Section: Introductionmentioning

confidence: 99%

Modeling the size dependent pull-in instability of beam-type NEMS using strain gradient theory

Koochi

Sedighi

Abadyan

2014

Lat. Am. j. solids struct.

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It is well recognized that size dependency of materials characteristics, i.e. size-effect, often plays a significant role in the performance of nano-structures. Herein, strain gradient continuum theory is employed to investigate the size dependent pull-in instability of beam-type nano-electromechanical systems (NEMS). Two most common types of NEMS i.e. nano-bridge and nano-cantilever are considered. Effects of electrostatic field and dispersion forces i.e. Casimir and van der Waals (vdW) attractions have been considered in the nonlinear governing equations of the systems. Two different solution methods including numerical and Rayleigh-Ritz have been employed to solve the constitutive differential equations of the system. Effect of dispersion forces, the size dependency and the importance of coupling between them on the instability performance are discussed.

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Development of AFM-based techniques to measure mechanical properties of nanoscale structures

Cited by 193 publications

References 26 publications

Mechanisms for Fatigue of Micron‐Scale Silicon Structural Films

Mechanisms for Fatigue of Micron‐Scale Silicon Structural Films

Nanoscale friction and wear maps

Modeling the size dependent pull-in instability of beam-type NEMS using strain gradient theory

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