Development of a Thermoelectric Energy Generator With Double Cavity by Standard CMOS Process

Yang, Shih-Ming; Wang, S. H.

doi:10.1109/jsen.2020.3014347

Cited by 18 publications

(2 citation statements)

References 28 publications

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“…9,10) Since these findings, the development of TE devices utilizing Si-NWs has made great strides. [11][12][13][14] Previous studies have introduced micro-TE devices with cavities within the Si substrate or around Si-NWs. These cavities are intended to manipulate heat conduction and concentrate the heat flow on the TE materials.…”

Section: Introductionmentioning

confidence: 99%

Experimental demonstration of scalability in a cavity-free planar silicon-integrated thermoelectric device

Arai,

Miura,

Mahfuz

et al. 2024

Jpn. J. Appl. Phys.

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We demonstrate the scalability of cavity-free planar integrated thermoelectric devices using silicon nanowires (Si-NWs), where miniaturizing the thermoelement by shortening the Si-NWs improves the areal power density. Shortening the Si-NW length decreases the temperature difference between the Si-NW ends and the open-circuit voltage. Meanwhile, the integrated number density of the thermoelement is increased by shortening the Si-NW length, thereby preserving the total electrical resistance. Bileg devices comprising both n- and p-type Si-NWs exhibited superior performance compared to unileg devices comprising only n-type Si-NWs. In unileg devices, the hot and cold electrodes in the adjacent thermoelements are interconnected through metal wiring, which leaks heat, resulting in a lowering of the temperature difference between the Si-NW ends. This study yields structural design guidelines for planar-integrated thermoelectric devices using Si-NWs.

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Section: Introductionmentioning

confidence: 99%

Experimental demonstration of scalability in a cavity-free planar silicon-integrated thermoelectric device

Arai,

Miura,

Mahfuz

et al. 2024

Jpn. J. Appl. Phys.

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show abstract

“…The common converting mechanism from thermal energy includes thermoelectricity, pyroelectricity, and thermomagneticity [ 6 ]. Thermoelectricity is a conversion mechanism based on the Seebeck effect; that is, when two dissimilar electrical conductors or semiconductors are joined together, they make a thermocouple and if the temperature difference is maintained between the two joining junctions, an electromotive force is developed [ 7 , 8 ]. Hao et al proposed a high efficiency thermoelectric energy harvester with the working temperature between 100 °C and 300 °C by suppressing intrinsic excitation in p-type Bi 2 Te 3 -based materials [ 9 ].…”

Section: Introductionmentioning

confidence: 99%

An Energy Harvester with Temperature Threshold Triggered Cycling Generation for Thermal Event Autonomous Monitoring

Han

Wang

et al. 2021

Micromachines

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This paper proposes a temperature threshold triggered energy harvester for potential application of heat-event monitoring. The proposed structure comprises an electricity generation cantilever and a bimetallic cantilever that magnetically attract together. When the structure is heated to a pre-set temperature threshold, the heat absorption induced bimetallic effect of the bimetallic cantilever will cause sufficient bending of the generation cantilever to get rid of the magnetic attraction. The action triggers the freed generation cantilever into resonance to piezoelectrically generate electricity, and the heated bimetallic cantilever dissipates heat to the environment. With the heat dissipated, the bimetallic cantilever will be restored to attract with the generation cantilever again and the structure returns to the original state. Under continual heating, the temperature threshold triggered cycle is repeated to intermittently generate electric power. In this paper, the temperature threshold of the harvester is modeled, and the harvester prototype is fabricated and tested. The test results indicate that, with the temperature threshold of 71 °C, the harvesting prototype is tested to generate 1.14 V peak-to-peak voltage and 1.077 μW instantaneous power within one cycle. The thermal harvesting scheme shows application potential in heat event-driven autonomous monitoring.

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Review of thermal transport in phononic crystals

Nomura

Anufriev

Zhang

et al. 2022

Materials Today Physics

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Development of a Thermoelectric Energy Generator With Double Cavity by Standard CMOS Process

Cited by 18 publications

References 28 publications

Experimental demonstration of scalability in a cavity-free planar silicon-integrated thermoelectric device

Experimental demonstration of scalability in a cavity-free planar silicon-integrated thermoelectric device

An Energy Harvester with Temperature Threshold Triggered Cycling Generation for Thermal Event Autonomous Monitoring

Review of thermal transport in phononic crystals

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