An orthogonal acceleration time-of-flight secondary ion mass spectrometry (TOF-SIMS) system has been developed using a prototype vacuum-electrospay primary beam source that is capable of producing continuous ion beam of an ionic liquid. As a primary ion beam, an imidazolium ionic liquid, 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl) amide (EMI-TFSA), was electrosprayed at pressures around 2 × 10 À4 Pa and a flow rate of 50 nL/min. Using the TOF-SIMS system, three samples were analyzed: (i) EMI-TFSA, (ii) an ammonium ionic liquid, N,N-diethyl-N-methyl-N-(2-methoxyethyl)ammonium bis(trifluoromethanesulfonyl) amide (DEME-TFSA), and (iii) a polyethylene glycol (PEG300). Preliminary data showed that the vacuum electrospray of the ionic liquid was applicable to a primary ion beam source for SIMS. Nevertheless, irradiation of the ionic-liquid beam caused deposition as well as sputtering. The deposition would result from larger m/z components of ionic-liquid charged droplets. This is because projectile energy per nucleon of the larger m/z components seems too low to sputter materials. Because m/z values of charged droplets decrease with decreasing flow rate, it is required to reduce the flow rate of the ionic liquid so as to suppress the deposition of the ionic-liquid beam.