Development of a Recurrent Fuzzy CMAC With Adjustable Input Space Quantization and Self-Tuning Learning Rate for Control of a Dual-Axis Piezoelectric Actuated Micromotion Stage

Wen, Chun-Ming; Cheng, Ming-Yang

doi:10.1109/tie.2012.2221114

Cited by 79 publications

(37 citation statements)

References 46 publications

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“…Additionally, the model predictive sliding mode control scheme by combining the advantages of the model predictive control and sliding mode control has been reported to improve the positioning performances of piezo-actuated stages [137], [181]. Attempts have also been made to use intelligent control techniques such as neural network control [182]- [184], fuzzy control [185], [186], and iterative control [187], [188] for high-precision tracking control of piezo-actuated stages owing to their representative properties and capabilities including input-output mapping or universal function approximation for nonlinear systems. Alternatively, passivity approaches have been applied for stability analysis and control design for systems with the Preisach hysteresis model [142] (without system dynamics) or Duhem hysteresis model [189].…”

Section: B Feedback Controlmentioning

confidence: 99%

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Zhu

et al. 2016

IEEE Trans. Automat. Sci. Eng.

506

216

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Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.Note to Practitioners-Piezo-actuated nanopositioning stages featuring fast response, large force, and fine resolution appear poised to play an increasingly important role in fields requiring micro/nano positioning. Such stages, however, exhibit complex piezoelectric behavior, which is often neglected, including: frequency response, nonlinear electric field dependence, creep, aging, and thermal behavior. The presence of such a behavior observed in the stages poses challenges in realizing precise micro/nanopositioning performance. This paper presents an overview of the piezo-actuated nanopositioning stages emphasizing the key role of modeling and control techniques, where high accuracy is important.

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Section: B Feedback Controlmentioning

confidence: 99%

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Zhu

et al. 2016

IEEE Trans. Automat. Sci. Eng.

506

216

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“…As a result, it is practically difficult to realize a translation over 10 mm, even though lever transmission mechanisms can be employed to amplify the output displacement [25]. In addition, piezoelectric actuators exhibit inherent hysteresis and drift nonlinearities, which complicates the achievement of precision positioning [26], [27]. Alternatively, electromagnetic actuators or voice coil motors (VCMs) have been applied in more recent development of flexure parallel XY stages.…”

Section: Introductionmentioning

confidence: 99%

Design and Development of a Compact Flexure-Based $XY$ Precision Positioning System With Centimeter Range

2014

IEEE Trans. Ind. Electron.

214

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This paper presents the design and development of a novel flexure parallel-kinematics precision positioning stage with a centimeter range and compact dimension. The stage mechanism is devised using leaf flexures to achieve a decoupled and modular structure. Structural parameters are carefully designed to guarantee the range, stiffness, resonant frequency, and payload capabilities in consideration of manufacturing tolerance. The parametric design is verified by conducting finite-element analysis, which reveals a reachable motion range over 20 mm in each working axis. Moreover, a prototype XY stage is fabricated, which is actuated and sensed by two voice coil motors and laser displacement sensors, respectively. Experimental results demonstrate that the stage is capable of positioning with a workspace over 11 mm × 11 mm. It is more compact than existing works, which is reflected by a larger area ratio of workspace to planar dimension. Both static and dynamic tests exhibit a small crosstalk between the two axes, which indicates a well-decoupled motion property. The implemented feedback control enables a precision positioning with submicrometer resolution and accuracy. The control bandwidth and payload influences on stage performances are experimentally examined as well.

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“…Many piezo-driven stages have been designed because the piezoelectric actuators have many advantages including high-resolution, wide bandwidth and compact size [5][6][7][8]. However, the piezo-driven mechanisms have some shortcomings including short strokes, inherent hysteresis and creep nonlinearities, making it difficult and to obtain high precision positioning with large motion stroke [9][10].…”

Section: Introductionmentioning

confidence: 99%

A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism

Shang

Tian

et al. 2015

Review of Scientific Instruments

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. (2015) A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism. Review of Scientific Instruments, 86 (9). 095001. Permanent WRAP url:http://wrap.warwick.ac.uk/76432 Copyright and reuse:The Warwick Research Archive Portal (WRAP) makes this work by researchers of the University of Warwick available open access under the following conditions. Copyright © and all moral rights to the version of the paper presented here belong to the individual author(s) and/or other copyright owners. To the extent reasonable and practicable the material made available in WRAP has been checked for eligibility before being made available.Copies of full items can be used for personal research or study, educational, or not-for profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. Publisher's statement:Copyright ( A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP url' above for details on accessing the published version and note that access may require a subscription.

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Development of a Recurrent Fuzzy CMAC With Adjustable Input Space Quantization and Self-Tuning Learning Rate for Control of a Dual-Axis Piezoelectric Actuated Micromotion Stage

Cited by 79 publications

References 46 publications

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Design and Development of a Compact Flexure-Based $XY$ Precision Positioning System With Centimeter Range

A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism

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