Development of a planar type micro electro magnetic distance sensor using high aspect ratio photoresist and its application

Ding, Xianhe; Kuribayashi, Katsutoshi; Hashida, T.

doi:10.1109/mhs.1999.820010

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)

DOI: 10.1109/mhs.1999.820010

|View full text |Cite

Development of a planar type micro electro magnetic distance sensor using high aspect ratio photoresist and its application

Xianhe Ding

Katsutoshi Kuribayashi²,

T. Hashida³

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Publication Types

Select...

Other2

Relationship

Self Cite0

Independent2

Authors

Journals

Cited by 2 publications

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Development of a planar type micro electro magnetic distance sensor using high aspect ratio photoresist and its application

Cited by 2 publications

References 10 publications

Analysis of the mutual inductance of energy-transferring component for a novel electromagnetic tactile sensor

Analysis of the mutual inductance of energy-transferring component for a novel electromagnetic tactile sensor

Development of a new type tactile sensor using micro electromagnetic coil for human robot

Contact Info

Product

Resources

About