Development of a novel chemical mechanical polishing slurry and its polishing mechanisms on a nickel alloy

Zhang, Zhenyu; Liao, Longxing; Wang, Xinze; Xie, Wenxiang; Guo, Dongming

doi:10.1016/j.apsusc.2019.144670

Cited by 154 publications

(32 citation statements)

References 35 publications

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“…In recent years, sustainable development has become a typically discussed theme worldwide and has increasingly attracted people's attention toward protecting the environment and energy saving, resulting in numerous advanced techniques being exploited. For example, novel environmentally friendly slurries have been developed and used widely in the semiconductor, microelectronics, and optoelectronics industries, consequently reducing pollution induced by traditional manufacturing and industries significantly [1][2][3][4]. Recently, nontoxic and eco-friendly carbon-based materials including fullerene, carbon nanotubes, graphene, onion-like carbon, nano-graphite, and nanodiamond have become research hotspots in material and chemical sciences.…”

Section: Introductionmentioning

confidence: 99%

Tribological performance of various metal-doped carbon dots as water-based lubricant additives and their potential application as additives of poly(ethylene glycol)

Tang

Zhu

2021

Friction

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Advances in nano-lubricant additives are vital to the pursuit of energy efficiency and sustainable development. Carbon dots (CDs) have been widely investigated in the domain of lubricant additives owing to their extraordinary tribological properties, in particular, their friction-reducing and anti-wear properties. Metal-doped CDs are a new type of CDs, and their friction-reducing and anti-wear properties are attracting increasing attention. Therefore, a series of CDs doped with various divalent metal ions have been successfully synthesized via one-pot pyrolysis. The tribological properties of the synthesized CDs as water-based lubricant additives are in the following order: Zn-CDs > Cu-CDs ≫ Mg-CDs > Fe-CDs > U-CDs. Specifically, adding 1.0 wt% of Zn-CDs into water-based lubricant results in 62.5% friction and 81.8% wear reduction. Meanwhile, the load-carrying capacity of the water-based lubricant increases from 120 N to at least 500 N. Zn-CDs as an additive have long service life. Additionally, anion-tuned Zn-CDs fabricated via anion exchange exhibit promise as lubricant additives for poly(ethylene glycol). Based on the results of wear scar surface analyses, it is discovered that tribochemical films, primarily composed of iron oxides, nitrides, metal carbonates, zinc oxides, zinc carbonates, organic compounds, and embedded carbon cores, formed on the rubbing surfaces with a thickness of approximately 270 nm when Zn-CDs are used as additives. This film combined with the “ball-bearing” and third-particle effects of Zn-CDs contributed to excellent lubrication performance.

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Section: Introductionmentioning

confidence: 99%

Tribological performance of various metal-doped carbon dots as water-based lubricant additives and their potential application as additives of poly(ethylene glycol)

Tang

Zhu

2021

Friction

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“…However, the polishing effect of optimizing experimental parameters in the CMP process is limited [10][11][12][13]. Therefore, the development of a novel polishing slurry is desirable for improving the accuracy and efficiency of CMP [14][15][16][17][18][19]. As one of these components, abrasives are critical for removing the corrosion layer by mechanical grinding in a typical CMP process.…”

Section: Introductionmentioning

confidence: 99%

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

et al. 2021

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The chemical mechanical polishing (CMP) technology has been widely used for surface modification of critical materials and components with high quality and efficiency. In a typical CMP process, the mechanical properties of abrasives play a vital role in obtaining the ultra-precision and damage-free surface of wafers for improvement of their performances. In this work, a series of fine structured rod-shaped silica (RmSiO 2 )-based abrasives with controllable sizes and diverse ordered mesoporous structures were synthesized via a soft template approach, and successfully applied in the sustainable polishing slurry for improving the surface quality of cadmium zinc telluride (CZT) wafers. Compared with commercial silica gel, solid and mesoporous silica spheres, the RmSiO 2 abrasives present superior elastic deformation capacity and surface precision machinability on account of their mesoporous structures and rod shapes. Especially, ultra-precision surface roughness and relatively effective material removal speed were achieved by the CMP process using the RmSiO 2 abrasives with a length/diameter (L/d) ratio of 1. In addition, a potential CMP mechanism of the developed polishing slurry to CZT wafer was elucidated by analyzing X-ray photoelectron spectra and other characterizations. The proposed interfacial chemical and mechanical effects will provide a new strategy for improving abrasives' machinability and precision manufacture of hard-to-machine materials.

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“…Therefore, a novel polishing tool called an environment-friendly slurry has been recently developed to achieve high-performance surfaces while considering both economical and environmental aspects. 39–47…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, a novel polishing tool called an environment-friendly slurry has been recently developed to achieve highperformance surfaces while considering both economical and environmental aspects. [39][40][41][42][43][44][45][46][47] Based on the literature review, it can be concluded that the automatic nano-finishing of the femoral head of hip joint implants to achieve a uniform surface roughness with the least standard deviation has remained a concern in both industrial and research communities. In the present work, a novel technique is designed and fabricated based on the inverse replica fixture of the femoral head in the AFF process to achieve an approximately uniform surface roughness.…”

Section: Introductionmentioning

confidence: 99%

Optimal parameters of abrasive flow finishing for hip joint implants

Choopani

Khajehzadeh

Razfar

2021

Proceedings of the Institution of Mechanical Engineers, Part B:

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Total hip arthroplasty (THA) is one of the most well-known orthopedic surgeries in the world which involves the substitution of the natural hip joint by prostheses. In this process, the surface roughness of the femoral head plays a pivotal role in the performance of hip joint implants. In this regard, the nano-finishing of the femoral head of the hip joint implants to achieve a uniform surface roughness with the lowest standard deviation is a major challenge in the conventional and advanced finishing processes. In the present study, the inverse replica fixture technique was used for automatic finishing in the abrasive flow finishing (AFF) process. For this aim, an experimental setup of the AFF process was designed and fabricated. After the tests, experimental data were modeled and optimized to achieve the minimum surface roughness in the ASTM F138 (SS 316L) femoral head of the hip joint through the use of response surface methodology (RSM). The results confirmed uniform surface roughness up to the range of 0.0203 µm with a minimum standard deviation of 0.00224 for the femoral head. Moreover, the spherical shape deviation of the femoral head was achieved in the range of 7 µm. The RSM results showed a 99.71% improvement in the femoral head surface roughness (0.0007) µm under the optimized condition involving the extrusion pressure of 9.10 MPa, the number of finishing cycles of 95, and SiC abrasive mesh number of 1000.

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Development of a novel chemical mechanical polishing slurry and its polishing mechanisms on a nickel alloy

Cited by 154 publications

References 35 publications

Tribological performance of various metal-doped carbon dots as water-based lubricant additives and their potential application as additives of poly(ethylene glycol)

Tribological performance of various metal-doped carbon dots as water-based lubricant additives and their potential application as additives of poly(ethylene glycol)

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

Optimal parameters of abrasive flow finishing for hip joint implants

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