“…As a high-performance functional device, the piezoelectric actuator has the advantages of small size, high displacement resolution, fast response speed, compact structure, large driving force, and low cost. Therefore, it has a broad application prospect in the fields of micro-assembly (Heriban et al, 2008), intelligent structure (Gao et al, 2020;Tanaka, 2014), precision machining (Lin et al, 2016), nanotechnology (Gu et al, 2016;Li et al, 2019), bioengineering (Zainal et al, 2015). For example, it is used in the assembly of micro-parts (Schro¨ter and Schmidt, 2018), the probe positioning of scanning probe microscope (Lu et al, 2018), the clamping of cells in bioengineering (Garce´s-Schro¨der et al, 2015;Kim et al, 2008).…”