2007
DOI: 10.1007/s00542-006-0341-6
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Development of a multi-layer microelectrofluidic platform

Abstract: We report on the development of process capabilities for a polymer-based, multi-layer microelectrofluidic platform, namely: the hot embossing process, metallization on polymer and polymer bonding. Hot embossing experiments were conducted to look at the effects of load applied, embossing temperature and embossing time on the fidelity of line arrays representing micro channels. The results revealed that the embossing temperature was a more sensitive parameter than the others due to its large effect on the polyme… Show more

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Cited by 13 publications
(9 citation statements)
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“…The process is different from hot embossing where the polymer substrate is given ample time to heat up and cooling is carried out with the force still applied. Table 1 lists some differences between the conventional hot embossing (Ng et al 2007) that uses a flat, rigid mould and hot roller embossing. Typically, conventional hot embossing can give a better replication of the mould because the polymer can be demoulded at a temperature below its glass transition temperature, minimizing any polymer flow after the mould is removed.…”
Section: Hot Roller Embossingmentioning
confidence: 99%
“…The process is different from hot embossing where the polymer substrate is given ample time to heat up and cooling is carried out with the force still applied. Table 1 lists some differences between the conventional hot embossing (Ng et al 2007) that uses a flat, rigid mould and hot roller embossing. Typically, conventional hot embossing can give a better replication of the mould because the polymer can be demoulded at a temperature below its glass transition temperature, minimizing any polymer flow after the mould is removed.…”
Section: Hot Roller Embossingmentioning
confidence: 99%
“…As shown in Fig. 16, the mould cavities could be fully filled and the grating structure is well-defined after embossing at 260 • C [34]. The temperature is one of the most important parameters in the roll embossing process.…”
Section: Effects Of Extrusion Temperaturementioning
confidence: 99%
“…22 shows some of the samples after roll embossing. When the COC substrate was heated to above its T g of 120 • C [34] and with adequate embossing pressure and time, the elastomeric mould features were transferred.…”
Section: Effects Of Roller Pressurementioning
confidence: 99%
“…The process is different from hot embossing where the polymer substrate is given ample time to heat up and cooling is carried out with the force still applied. Table 1 lists some differences between the conventional hot embossing [5] that uses a flat, rigid mould and hot roller embossing. Typically, conventional hot embossing can give a better replication of the mould because the polymer can be demoulded at a temperature below its glass transition temperature, minimizing any polymer flow after the mould is removed.…”
Section: Hot Roller Embossingmentioning
confidence: 99%