2000
DOI: 10.1016/s0022-0248(99)00805-2
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Development of a modular, large-scale, high-throughput semicontinuous-mode liquid-phase epitaxy system

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Cited by 6 publications
(3 citation statements)
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“…The low throughput of conventional slideboat LPE systems is a disadvantage. However, large-scale, continuous-mode, high-throughput LPE systems, using large (>75 mm) diameter substrates, can be implemented, especially when only a single epitaxial layer is needed [28]. As discussed later, a high-performance TPV device can be realized by forming a p-n junction with zinc diffusion in single epitaxial layer.…”
Section: Liquid-phase Epitaxy (Lpe) Of Gasb-related Tpv Cellsmentioning
confidence: 99%
“…The low throughput of conventional slideboat LPE systems is a disadvantage. However, large-scale, continuous-mode, high-throughput LPE systems, using large (>75 mm) diameter substrates, can be implemented, especially when only a single epitaxial layer is needed [28]. As discussed later, a high-performance TPV device can be realized by forming a p-n junction with zinc diffusion in single epitaxial layer.…”
Section: Liquid-phase Epitaxy (Lpe) Of Gasb-related Tpv Cellsmentioning
confidence: 99%
“…By the 1980s, LPE has been serving as the most important technique for fabricating semiconductor films, , with the development of the electronic and optoelectronic industries as well as bubble memory device applications in the early stage . Over the past decades, the highly versatile technique has provided considerable new opportunities for equipment designs, ranging from simple top-dipping units used in small laboratories to sophisticated systems used for manufacturing-scale production of semiconductor films in the optoelectronics industry …”
Section: Introductionmentioning
confidence: 99%
“…5 Over the past decades, the highly versatile technique has provided considerable new opportunities for equipment designs, ranging from simple topdipping units used in small laboratories to sophisticated systems used for manufacturing-scale production of semiconductor films in the optoelectronics industry. 6 With the discovery of the high-temperature superconductor (HTS) YBa 2 Cu 3 O 7-δ (YBCO or Y123) in 1986, 7 LPE films have drawn surging interest due to their excellent performance. Proceeding at extremely low supersaturation, the Frank−van der Merwe mode could be obtained during the LPE process (i.e., layer by layer) with the exploitation of desirable substrates.…”
Section: Introductionmentioning
confidence: 99%