2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) 2013
DOI: 10.1109/memsys.2013.6474320
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Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration

Abstract: Molecular Electronic Transducer (MET) is a recent technology applied in seismic instrumentation that proves highly beneficial to planetary seismology. MET is an electrochemical cell that senses the movement of liquid electrolyte between electrodes by converting it to the output current. Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, lack of fragile moving parts and independence on the direction of sensitivity axis. This… Show more

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Cited by 16 publications
(15 citation statements)
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“…Meanwhile making sizes of elements of the cell smaller expands the frequency range and decreases convection produced noise inside the sensitive cell. An alternative approach to build the sensing element is to use (MEMS) techniques, which have reduced the internal dimensions of MET electrodes close to 1 μm, improved the sensitivity and reproducibility [18]. …”
Section: Molecular Electronic Transducer-principle Of Operationmentioning
confidence: 99%
See 3 more Smart Citations
“…Meanwhile making sizes of elements of the cell smaller expands the frequency range and decreases convection produced noise inside the sensitive cell. An alternative approach to build the sensing element is to use (MEMS) techniques, which have reduced the internal dimensions of MET electrodes close to 1 μm, improved the sensitivity and reproducibility [18]. …”
Section: Molecular Electronic Transducer-principle Of Operationmentioning
confidence: 99%
“…These shortcomings can be overcome by introducing MEMS microfabrication techniques to build the MET sensing element, as shown in Figure 6 [18], which reduces the MET cell size and produced the internal dimensions close to 1 μm. The use of MEMS allows batch fabrication, thereby lower the cost, improves the sensitivity and reproducibility of the device, and has reached 1 micro Gee noise level.…”
Section: Different Types Of Met Motion Sensormentioning
confidence: 99%
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“…The interaction of the chemical reaction and fluid motion in the form of the proportional ion concentration gradient ∇C generated by acceleration a causes the current between the anodes and cathodes to change. The differential current from the two cathodes, which is the output of the sensing element, also forms the input to the signal conditioning circuit for the next process [6][7][8][9][10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%