Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure

Taoka, Yuki; Hayashi, Terumichi; Xu, Sanchuan; Saito, Shigeki

doi:10.1080/01691864.2023.2279603

Advanced Robotics

2023

DOI: 10.1080/01691864.2023.2279603

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Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure

Yuki Taoka,

Terumichi Hayashi,

Sanchuan Xu

et al.

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Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure

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References 16 publications

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