Development of a long life, 2 kHz repetition rate X-ray preionizer

Scott, Simon

doi:10.1007/bf00348627

Cited by 12 publications

(10 citation statements)

References 14 publications

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“…This specific net gain coefficient is considerably higher than previously reported values [3][4][5], even taking into account the large experimental errors. The FHWM of the gain waveform is ∼ 60 ns.…”

Section: O N C L U S I O Ncontrasting

confidence: 73%

“…With an increase of the charging voltage the total current increases while the discharge expands, however the steady-state voltage and the current density stay constant. The current density is that in the posi-FIGURE 5 Dependencies of the peak net gain (g − α)L and peak spontaneous emission signal on the peak pumping power. Discharges in F 2 : Ar : He (0.1% : 5% : 94.9%) (1) and F 2 : He : Ar : Ne (0.1% : 1.9% : 5% : 93%) (2) gas mixtures at a total gas pressure of 2 bar FIGURE 6 Typical dependencies of the specific peak net gain (g − α) and specific peak spontaneous emission signal on the peak pumping power deposition density.…”

Section: Resultsmentioning

confidence: 99%

“…A vacuum corona-plasma cathode similar to the devices described in [5,6] is used to create an electron beam that converts its energy into X-ray radiation when the e-beam is stopped by a thin Ta foil (∼ 100 µm). The output window of the source is shielded by Pb plates to form a collimated X-ray beam 1 cm in diameter.…”

Section: Experimental Setup and Methodsmentioning

confidence: 99%

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Laser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures

2008

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Spatial and temporal gain profiles as well as the peak net gain at 193 nm have been measured in X-ray preionized discharges excited by a single pulse electrical system working in the charge transfer mode. Ar-and F 2 -containing laser gas mixtures with He or Ne as a buffer gas have been used. With a pumping pulse duration of ∼ 100 ns (FWHM) and a specific peak power deposition of ∼ 1 MW cm −3 bar −1 in a gas mixture containing F 2 : Ar : He (0.1% : 5% : 94.9%), at 2 bar total pressure, a very high peak net gain coefficient of ∼ 30% cm −1 was measured in the gas discharge. The FWHM of the gain waveform was ∼ 60 ns.

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Section: O N C L U S I O Ncontrasting

confidence: 73%

Section: Resultsmentioning

confidence: 99%

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Laser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures

2008

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“…This is shown in figure 4 for argon. A lifetime of 2.5x108 shots of this type of x-ray source has been demonstrated by Scott [8]. Although the lifetime is possibly shorter than that of thermionic cathodes, the corona-plasma cathodes can easily be replaced and the vacuum requirements are very moderate (lOg torr).…”

Section: X-ray Pre-ionisation Sourcementioning

confidence: 99%

“…However, this type of cathodes is highly sensitive to ion bombardment, so operation under ultra-high vacuum is required. The problem to maintain this UHV during high repetition rate operation of the thermionic x-ray source motivated us to develop an x-ray source applying coronaplasma cathodes [7,8]. An x-ray source based on this technology is currently in use as the pre-iomzer of our high repetition rate XeC1 laser system.…”

Section: X-ray Pre-ionisation Sourcementioning

confidence: 99%

<title>High-average power XeCl laser with x-ray preionization and spiker-sustainer excitation</title>

Goor

Witteman

Timmermans³

et al. 1994

SPIE Proceedings

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On the performance of an ArF and a KrF laser as a function of the preionisation timing and the excitation mode

Feenstra¹,

Hoekstra²,

Peters³

et al. 2000

Appl Phys B

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An X-ray preionised ArF and KrF excimer laser has been studied with three different spiker-sustainer excitation circuits. We observed large differences in the laser performance, when the preionisation delay timing was varied on a nanosecond timescale. The behaviour of both lasers was found to be equivalent. The observations can be understood by considering the effect of the discharge excitation technique on the preionisation process. An excitation mode with a prepulse well above the steady-state voltage V SS with a subsequent reversed overshoot voltage for initiating the discharge, in combination with a well-timed preionisation pulse is found to give the best results. Optimum output energies of 50 mJ with ArF and 175 mJ with KrF were obtained from an active volume of 60 × 1.5 × 1.2 cm in the so-called swing mode, with the preionisation applied 60 ns before the discharge breakdown.

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Development of a long life, 2 kHz repetition rate X-ray preionizer

Cited by 12 publications

References 14 publications

Laser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures

Laser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures

<title>High-average power XeCl laser with x-ray preionization and spiker-sustainer excitation</title>

On the performance of an ArF and a KrF laser as a function of the preionisation timing and the excitation mode

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