Development of a grinding–drilling technique for holing optical grade glass

A force controlled grinding-milling technique for quartz-glass micromachining

“…4(a)- (1)). With consideration given to both tool strength and escaping chips, a back rake angle of −60 • between the tool's centerline and the inclined plane is recommended (Chen et al, 2011). That is, the grinding-edge is tilted at 30 • with respect to the machined surface.…”

Development of High-precision Micro CNC Machine with Three-dimensional Measurement System

“…The machine structure in this study is divided into four parts: the base, Z-axis cantilever, adapter and the fuel tank, as schematized in Figure 1. The overall size is 660 × 840 × 770 mm 3 . The basic structure of the machine is composed of a base and a Z-axis inverted L-shaped cantilever.…”

“…It not only doesn't need additional mold design, but also creates finished products with anti-wear and high accuracy. In addition, micro-EDM can be utilized to process a wide variety of products including ink jet printer heads [1], micro-nozzles for atomizing film production [2], micro-vias [3], miniaturized biomedical products such as micro-delivery devices and micro-fluidic mixers [4], micro-biochips [5], and micro-pumps [6]. Therefore, in order to complete the processing of micro-components, Chen [7] developed a multi-task small computer numerical control (CNC) machine.…”

Abrasive waterjet micro-piercing of borosilicate glass

“…Egashira and Mizutani (2002) have shown that ultrasonic drilling is capable of producing high quality holes, and were able to produce 10 µm diameter ultrasonically drilled holes in glass using a micro tool; however, they were limited to small depth of cut (20 µm) and restricted by the size and stresses of the cutting. Chen et al (2011), and Quan et al (2010), produced small holes in glass using mechanical drilling-grinding tools, but were limited to meso features size (~1mm) due to the diameter of the tools, and slow drill speeds.…”