Development of a Driving and Control System of Large Stroke 3-D Air-Floating Motion Stage With Submicrometer-Scale Positioning Accuracy

Zhang, Fan; Huang, Qiangxian; Cheng, Rongjun; Zhang, Liansheng; Li, Hongli; Li, Ruijun; Pan, QiaoSheng

doi:10.1109/jsen.2023.3342041

IEEE Sensors J.

2024

DOI: 10.1109/jsen.2023.3342041

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Development of a Driving and Control System of Large Stroke 3-D Air-Floating Motion Stage With Submicrometer-Scale Positioning Accuracy

Fan Zhang,

Qiangxian Huang,

Rongjun Cheng

et al.

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Development of a Driving and Control System of Large Stroke 3-D Air-Floating Motion Stage With Submicrometer-Scale Positioning Accuracy

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References 35 publications

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