Development of a coplanar grating interferometer for displacement and angle measurements

Hsu, Yi-Teng; Hsieh, Hung-Lin

doi:10.1117/12.2621531

Cited by 1 publication

(3 citation statements)

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“…The heterodyne interference method in a coplanar plane can achieve a high resolution [ 115 ], as shown in Figure 10 . Experiment results show that the angle resolutions of the system were found to be 33.7 nrad, while the values of repeatability were found to be 33.7 nrad [ 116 ]. The homodyne interference methods are shown in Figure 10 .…”

Section: High-precision With Single Axismentioning

confidence: 99%

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A Review: High-Precision Angle Measurement Technologies

Wang,

Ma,

Cao

et al. 2024

Sensors

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Angle measurement is an essential component of precision measurement and serves as a crucial prerequisite for high-end manufacturing. It guides the implementation of precision manufacturing and assembly. The current angle measurement methods mainly focus on multiple axes, high precision, and large measurement ranges. This article introduces the technology of angle measurement from the perspectives of single-axis and multi-axis measurement schemes. Firstly, the single-axis measurement scheme is primarily achieved through optical methods, such as encoder discs that measure energy changes and interferometric phase changes, as well as mechanical, electromagnetic, and inertial angle measurement methods, among which interferometric methods offer the highest accuracy, with high cost, and encoder discs provide the largest measurement range with an ordinary price. Secondly, in the multi-axis measurement scheme, autocollimation instruments, including plane mirrors, gratings, and self-designed targets, are the main options. Although grating encoders can achieve three degrees of freedom in angle measurement with an ordinary price, they are limited in terms of measurement range and sensitivity compared to self-designed targets. Lastly, artificial intelligence assistance precision measurement is increasingly being embraced due to significant advancements in computer performance, making it more convenient to identify the relationship between measured values and detection values. In conclusion, angle measurement plays a crucial role in precision manufacturing, and the evolving and improving technologies provide the manufacturing industry with greater choices. The purpose of this review is to help readers quickly find more suitable technical solutions according to current application requirements, such as single/multiple axes, accuracy level, measuring range, budget, etc.

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Section: High-precision With Single Axismentioning

confidence: 99%

“… ( a ) Coplanar grating interferometer [ 116 ]; ( b ) double-diffraction grating interferometer [ 115 ]. …”

Section: Figurementioning

confidence: 99%