Development of a control system for a microrobot-based nanohandling station

Garnica, S.; Hülsen, Beige; Fatikow, Sergej

doi:10.1016/s1474-6670(17)33449-3

Cited by 6 publications

(3 citation statements)

References 4 publications

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“…In situ microprocessing under microscopes is an interesting application although the costs of installing fine mechanisms to microscopic instruments is expensive [11]. There are many reports about a micromanipulation supported by precise microrobots to study industrial applications where such precise microrobots provide effective benefits [12][13][14][15]. Over the last several years, we have developed versatile microrobots for microscopic manipulations [16].…”

Section: Introductionmentioning

confidence: 99%

Development of the orthogonal microrobot for accurate microscopic operations

Fuchiwaki

Misaki

Kanamori

et al. 2008

J. Micro-Nano Mech.

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In this paper, we describe the development of an orthogonal microrobot for accurate microscopic operations. To conduct the microscopic operation, a simple locomotion mechanism composed of one piezoelectric actuator and two U-shaped electromagnets is proposed. The orthogonal microrobot can move precisely in one-axis with the manner of an inchworm. We use permanent magnets so that this robot can fix itself on a steel surface when no voltage is applied. To provide XY orthogonal positioning, we connect one microrobot to another microrobot orthogonally. To realize cell processing, we arrange the three two-axial orthogonal microrobots on an inverted microscope. We load a simple micropump on right and left robots to hold biological samples such as an egg cell and to inject reagent solutions into biological samples. Finally, we arrange another microrobot between the other two microrobots to position samples. The whole cell processing device is very small, so we can easily set up the whole device to microprocessing instruments. In experiments, orthogonal microrobots succeeded in holding an egg cell with a diameter of 100 μm and sticking the pipette with a diameter of 5 μm into the egg cell under a specific GUI control system with a visual feedback function.

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Section: Introductionmentioning

confidence: 99%

Development of the orthogonal microrobot for accurate microscopic operations

Fuchiwaki

Misaki

Kanamori

et al. 2008

J. Micro-Nano Mech.

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“…The algorithm allows a sensor update rate of 15 poses/s, using a standard PC (2.6 GHz). The pose information is directly used as visual feedback for telemanipulation or by the control system of the nanohandling station [10].…”

Section: Introductionmentioning

confidence: 99%

Real-time object tracking for the robot-based nanohandling in a scanning electron microscope

Fatikow¹,

Sievers²

2006

Journal of Micromechatronics

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In this paper, current research work on an automated nanohandling station using mobile microrobots is presented. For the automated positioning of mobile microrobots a closed-loop control system is necessary, usually using data from pose sensors for the degrees of freedom (DOF) of the microrobot are needed. Mobile microrobots with piezo slip-stick actuation mostly do not have internal pose sensors to determine a global pose. This paper focuses on the continuous pose estimation (tracking) of mobile microrobots by external visual sensors. One possibility for fast pose estimation is the application of video cameras in combination with image processing algorithms as global sensors. However, for pose estimation with accuracy in the nanometer range high-resolution sensors are necessary. In consideration of resolution, image acquisition time and depth of focus a scanning electron microscope (SEM) is a powerful sensor for high-resolution pose estimation of a microrobot. On the other hand, the use of a SEM requires high demands on the image processing. High update rates of the pose data for the robot control require a short image acquisition time of the SEM images. As a result, the image noise increases as frame averaging or averaging of the detector signal is time consuming. This paper presents two approaches to tracking a micro-object in a SEM image stream. First, a cross-correlation algorithm is described, which enables pose estimation (x, y, ϕ) in extremely noised images in real-time. Afterwards object tracking with active contours is presented. This approach allows real-time tracking with more than 3 DOF by using shape spaces, instead of defining large model sets as it is necessary for correlation-based pattern matching.

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“…The focus will be the image processing algorithms that determine the poses of the mobile microrobots. The pose information is directly used as visual feedback for telemanipulation or by the control system of the workstation (Garnica et al, 2003).…”

Section: Introductionmentioning

confidence: 99%

POSE ESTIMATION OF MOBILE MICROROBOTS IN A SCANNING ELECTRON MICROSCOPE - A cross-correlation based approach using ROI´s

Sievers¹,

Fatikow²

2005

Proceedings of the Second International Conference on Informatics in Control, Automation and Robotics

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In this paper, current research towards an automated micro/nano handling station using mobile microrobots is presented. Mobile microrobots with piezo slip-stick actuation and more than one degree of freedom mostly don't have internal pose sensors; therefore a global sensor is needed. This paper focuses on the pose estimation of the mobile microrobots. One possibility for fast pose estimation is the application of video cameras as global sensors. For pose estimation with accuracy even in the nanometer range high resolution sensors are necessary. In consideration of resolution, image acquisition time and depth of focus a Scanning Electron Microscope (SEM) is a powerful sensor for high resolution pose estimation. But the use of a SEM makes high demands on the image processing. High update rates of the pose data for the robot control enforce a short image acquisition time of the SEM images. Hence the image noise increases, because frame averaging or averaging of the detector signal is time consuming. This paper presents a method to calculate the x,y position and the orientation of a micro object in a strongly noised SEM image stream with crosscorrelation in real-time. To make real-time pose estimation possible, only a region-of-interest (ROI) is correlated with the target pattern. The SEM is almost predestined to work with ROI's, because the scan area of the electron beam can be chosen arbitrarily.

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Development of a control system for a microrobot-based nanohandling station

Cited by 6 publications

References 4 publications

Development of the orthogonal microrobot for accurate microscopic operations

Development of the orthogonal microrobot for accurate microscopic operations

Real-time object tracking for the robot-based nanohandling in a scanning electron microscope

POSE ESTIMATION OF MOBILE MICROROBOTS IN A SCANNING ELECTRON MICROSCOPE - A cross-correlation based approach using ROI´s

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