Development of a broadband photodetector utilizing ZnO nanorods with grating structure fabricated via nanoimprint lithography

Li, Ming-Hsien; Chen, Jyun-Jie; Chen, Yi-Sheng; Lin, Ssu-Ting; Lin, Bo-Hong; Kuo, Ming-Yu; Lin, Chun-Hung; Chen, Hsiang; Han, Jung

doi:10.1016/j.sna.2024.115530

Sensors and Actuators A: Physical

2024

DOI: 10.1016/j.sna.2024.115530

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Development of a broadband photodetector utilizing ZnO nanorods with grating structure fabricated via nanoimprint lithography

Ming-Hsien Li,

Jyun-Jie Chen,

Yi-Sheng Chen

et al.

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Development of a broadband photodetector utilizing ZnO nanorods with grating structure fabricated via nanoimprint lithography

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References 51 publications

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