Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

Muhammad, Haseena Bashir; Oddo, Calogero Maria; Beccai, Lucia; Recchiuto, Carmine Tommaso; Anthony, Carl; Adams, M.J.; Carrozza, Maria Chiara; Hukins, D. W. L.; Ward, MA

doi:10.1016/j.sna.2010.10.025

Cited by 90 publications

(56 citation statements)

References 30 publications

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“…8]. Another MEMS-based sensor was explicitly bioinspired in its construction and application as a robotic finger and, similarly, has overlapping receptive fields [39,Fig. 12].…”

Section: A Construction Of the Tactile Sensormentioning

confidence: 99%

Tactile Superresolution and Biomimetic Hyperacuity

et al. 2015

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Motivated by the impact of superresolution methods for imaging, we undertake a detailed and systematic analysis of localization acuity for a biomimetic fingertip and a flat region of tactile skin. We identify three key factors underlying superresolution that enable the perceptual acuity to surpass the sensor resolution: 1) the sensor is constructed with multiple overlapping, broad but sensitive receptive fields; 2) the tactile perception method interpolates between receptors (taxels) to attain subtaxel acuity; and 3) active perception ensures robustness to unknown initial contact location. All factors follow from active Bayesian perception applied to biomimetic tactile sensors with an elastomeric covering that spreads the contact over multiple taxels. In consequence, we attain extreme superresolution with a 35-fold improvement of localization acuity (0.12 mm) over sensor resolution (4 mm). We envisage that these principles will enable cheap high-acuity tactile sensors that are highly customizable to suit their robotic use. Practical applications encompass any scenario where an end-effector must be placed accurately via the sense of touch.Index Terms-Biomimetics, force and tactile sensing.

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“…8]. Another MEMS-based sensor was explicitly bioinspired in its construction and application as a robotic finger and, similarly, has overlapping receptive fields [39,Fig. 12].…”

Section: A Construction Of the Tactile Sensormentioning

confidence: 99%

Tactile Superresolution and Biomimetic Hyperacuity

et al. 2015

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“…(5) is 2.88 nm eV/d, in agreement with theoretical value which is 0.57 eV for 5 nm pristine primary AuNCs and 0.106 eV for 27 nm primary AuNCs after annealing. The work function dependence observed here, along with the corresponding capacitive effects, can be used in the development of previously demonstrated capacitive sensing application[38][39][40][41][42] and single electrons transistors[43][44][45][46] .…”

mentioning

confidence: 92%

Effect of nanoscale size and medium on metal work function in oleylamine-capped gold nanocrystals

Abdellatif

Ghosh

Liakos

et al. 2016

Journal of Physics and Chemistry of Solids

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“…Intelligent robot skin with tactile sensing capability can help robots operate in unknown environments and safely interact with people and objects [2]. In the literature, flexible tactile sensors can be classified into several sensing mechanisms, which are capacitive [3,4,5,6], piezoresistive [7,8,9,10], piezoelectric [11,12,13], thermoelectric [14], triboelectric [15,16], and other functional materials with sensing characteristics [17,18,19,20]. Among these, a capacitive sensing mechanism is usually preferred because of its simple structure, stable performance, and temperature independence [5].…”

Section: Introductionmentioning

confidence: 99%

The Design and Characterization of a Flexible Tactile Sensing Array for Robot Skin

Zhu

Liu

et al. 2016

Sensors

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In this study, a flexible tactile sensing array based on a capacitive mechanism was designed, fabricated, and characterized for sensitive robot skin. A device with 8 × 8 sensing units was composed of top and bottom flexible polyethyleneterephthalate (PET) substrates with copper (Cu) electrodes, a polydimethylsiloxane (PDMS) dielectric layer, and a bump contact layer. Four types of microstructures (i.e., pyramids and V-shape grooves) atop a PDMS dielectric layer were well-designed and fabricated to enhance tactile sensitivity. The optimal sensing unit achieved a high sensitivity of 35.9%/N in a force range of 0–1 N. By incorporating a tactile feedback control system, the flexible sensing array as the sensitive skin of a robotic manipulator demonstrated a potential capability of robotic obstacle avoidance.

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Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

Cited by 90 publications

References 30 publications

Tactile Superresolution and Biomimetic Hyperacuity

Tactile Superresolution and Biomimetic Hyperacuity

Effect of nanoscale size and medium on metal work function in oleylamine-capped gold nanocrystals

The Design and Characterization of a Flexible Tactile Sensing Array for Robot Skin

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