Development of 5-degree-of-freedom displacement measuring device using PSD

Nonlinear error compensation for 2D PSD based on SSA-BP neural network

“…They can be widely applied in displacement measurement, attitude detection, beam positioning, tracking, and calibration. [1][2][3][4] Due to the working environment and inherent characteristics, the output current of PSD devices often produces nonlinear errors, leading to a decrease in the overall accuracy of the measurement system. [5] To compensatethe nonlinear errors and improve the accuracy of PSD devices, two major types of nonlinear error compensation methods based on hardware system and software system compensation have been proposed.…”