Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property

Tang, Hui; Gao, Jian; Chen, Xin; Yu, Kai Ming; To, Suet; He, Yunbo; Chen, Xun; Zeng, Zhi; He, Sifeng; Chen, Chuangbin; Li, Yangmin

doi:10.1109/tie.2017.2758749

Cited by 84 publications

(24 citation statements)

References 17 publications

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“…However, inner-force analysis is required in these two methods, resulting in great complexity in serial-parallel compliant mechanisms. As a result, the compliance matrix method was developed for complex configurations [82][83][84][85][86][87]. Some theorized investigations on the compliance matrix method for compliant mechanisms were also conducted [87][88][89], in which the matrix operation enabled easy analysis of complex compliant mechanisms.…”

Section: Introductionmentioning

confidence: 99%

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Ling

Howell

Cao

et al. 2020

Applied Mechanics Reviews

142

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Flexure-based compliant mechanisms are becoming increasingly promising in precision engineering, robotics, and other applications due to the excellent advantages of no friction, no backlash, no wear, and minimal requirement of assembly. Because compliant mechanisms have inherent coupling of kinematic-mechanical behaviors with large deflections and/or complex serial-parallel configurations, the kinetostatic and dynamic analyses are challenging in comparison to their rigid-body counterparts. To address these challenges, a variety of techniques have been reported in a growing stream of publications. This paper surveys and compares the conceptual ideas, key advances, and applicable scopes, and open problems of the state-of-the-art kinetostatic and dynamic modeling methods for compliant mechanisms in terms of small and large deflections. Future challenges are discussed and new opportunities for extended study are highlighted as well. The presented review provides a guide on how to select suitable modeling approaches for those engaged in the field of compliant mechanisms.

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Section: Introductionmentioning

confidence: 99%

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Ling

Howell

Cao

et al. 2020

Applied Mechanics Reviews

142

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“…In some cases, PZT is installed with bolts preloading mechanism to realize high bandwidth, but the limited workspace cannot meet the demand of large stroke positioning. To enlarge the motion stroke, actuation amplification mechanisms have been adopted, like lever mechanism [21], bridge type mechanism [22], Scott-Russell mechanism [23] and differential mechanism [24], where bridge type amplifier has been investigated for wide applications due to its large magnification and compact size. Whereas, the low lateral stiffness of conventional BTA would damage the PZT actuator when bearing undesired external load or motion [25].…”

Section: Introductionmentioning

confidence: 99%

A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

Wang

Huo

Liang

et al. 2019

IEEE Trans. Ind. Electron.

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“…Currently, the process to design and manufacture a compliant micro-positioning stage requires high investment in time and cost. Meanwhile, monolithic micro-positioning stages are tailored to specific tasks with constant performances, working range, and overall size [14], [15]. When one of the set of flexure hinges is out-off order or the requirements of micro-positioning stage are to be modified, another new monolithic micro-positioning stage need to be fabricated for replacement or redesigned to meet the updated requirement, respectively.…”

Section: Introductionmentioning

confidence: 99%

Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules

et al. 2019

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Micro-positioning stages, which are capable to meet the emerging industrial trend for performing various kinds of micro-manipulation and micro-assembly tasks are the crucial tools to miniaturize the products under ultra-high precision. The current main practice is to specifically tailor a monolithic positioning stage design for one kind of micro-manipulation application. However, the design and fabrication of such a specific flexure-based micro-positioning stage are expensive in both the time and financial investment. In order to increase the flexibility and functionality of micro-positioning stages, this paper proposes a novel reconfigurable planar micro-positioning stages platform based on different function modules. A functional model-based approach is developed to divide one micro-positioning stage into a set of functionally independent sub-models, which allows flexible composition resulting in an adjustable new stage. The robustness of the proposed platform is demonstrated using some typical micro-positioning stages benchmarking cases. The effectiveness of assembly using flexible function modules is verified to show the benefits of the proposed design platform for reconfigurable micro-positioning stages. INDEX TERMS Reconfigurable micro-positioning stage, function modules, modular, low cost.

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Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property

Cited by 84 publications

References 17 publications

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules

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