2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) 2016
DOI: 10.1109/dtip.2016.7514845
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Development and integration of screen printed transducers for the detection of pollutants in aquatic environments

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“…Based on this limitation and the need to operate at higher temperatures, a second approach (which reduces the influence of the parallelism problem) is to use a screen-printing process in order to deposit piezoelectric material as the active element on a dedicated substrate. In previous work we developed a specific sensor based on screen printed lead zirconate titanate (PZT) and we proved the possibility of active element fabrication using material characterization [3] and ultrasonic measurements [4]. Our previous works demonstrated that the technology based on screen-printed piezoelectric layers was viable in a non-radiative environment and that the technology using solid materials was also viable for a radiative environment but for temperatures below 140°C.…”
Section: Introductionmentioning
confidence: 99%
“…Based on this limitation and the need to operate at higher temperatures, a second approach (which reduces the influence of the parallelism problem) is to use a screen-printing process in order to deposit piezoelectric material as the active element on a dedicated substrate. In previous work we developed a specific sensor based on screen printed lead zirconate titanate (PZT) and we proved the possibility of active element fabrication using material characterization [3] and ultrasonic measurements [4]. Our previous works demonstrated that the technology based on screen-printed piezoelectric layers was viable in a non-radiative environment and that the technology using solid materials was also viable for a radiative environment but for temperatures below 140°C.…”
Section: Introductionmentioning
confidence: 99%