Development and Evaluation of High-Stability Metal-Foil Resistor With a Resistance of 1 <inline-formula> <tex-math notation="LaTeX">$\text{k}\Omega $ </tex-math></inline-formula>

Abstract

Prototype models of a high-stability metal-foil resistor of 1 k with a four-terminal-pair design were developed, and the key characteristics were evaluated. Two types of metalfoil resistors were fabricated: serial number (s/n) 1 is made from two resistor devices of 500 and s/n 2 is made from three resistor devices of 333 . To develop these resistor devices, a new resistor-device design was introduced. The s/n 1 resistor has the following key characteristics: drift rate: 0.010 (μ / )/year, first-order temperature coefficient at 23°C: −0.165 (μ / )/°C, frequency dependence of the resistance (relative change in resistance normalized at 1 kHz): ±0.21 μ / in the frequency range from 400 Hz to 2 kHz, and time constant: −0.46 ns. The s/n 2 resistor has the following key characteristics: drift rate: −0.092 (μ / )/year, first-order temperature coefficient at 23°C: 0.096 (μ / )/°C, frequency dependence of the resistance (relative change in resistance normalized at 1 kHz): ±0.54 μ / in the frequency range from 400 Hz to 2 kHz, and time constant: 0.12 ns.Index Terms-Drift rate, electrical resistance measurement, frequency dependence, measurement standards, phase-angle measurements, resistors, temperature dependence.

Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition

“…The electrical stability of the films is crucial for any real device or sensing application. 41−44 To confirm the feasibility of these films for such applications, the RMS voltage stability of each film was measured (see the Supporting Information, Figure S8). All films were found to have an RMS film stability within 50 ppm.…”

Metrology and Measurement Systems

“…Although resistance standards based upon the quantum Hall effect are used today by some national metrology institutes (NMIs), much cheaper conventional standard resistors are still being used as national standards by many NMIs, especially those of relatively small countries. Moreover, new designs and metal alloys for standard resistors are being elaborated in order to achieve as small as possible drift of resistance, low sensitivity to environmental conditions, and the highest possible stability [5][6][7][8][9][10]. Drift rates of the order of 10 −9 (Ω/Ω)/year and stabilities of about 5 • 10 −8 Ω/Ω) have been reported [9,10].…”