Deterministic Figuring in Optical Machining by Ion Beam

Yifan, 戴一帆 Dai; Lin, 周林 Zhou; Xuhui, 解旭辉 Xie; Changjun, 焦长君 Jiao; Shengyi, 李圣怡 Li

doi:10.3788/aos20082806.1131

Cited by 6 publications

(3 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Ion beam finishing (IBF) involves the shaping and acceleration of ions generated through ionization, subsequently directing them to bombard the workpiece's surface. This process induces intricate collisions between the ions and the atoms of the workpiece [91]. The kinetic energy possessed by the ions is transferred to the surface atoms of the material.…”

Section: Ion Beam Finishingmentioning

confidence: 99%

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Li,

Xin,

Fan

et al. 2024

Micromachines

View full text Add to dashboard Cite

Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires ultra-smooth surfaces with sub-nanometer roughness, no sub-surface damage, minimal surface defects, low residual stresses, and intact lattice integrity. This necessity has driven the rapid development and diversification of ultra-smooth surface fabrication technologies. This paper summarizes recent advances in ultra-smooth surface processing technologies, categorized by their material removal mechanisms. A subsequent comparative analysis evaluates the roughness and polishing characteristics of ultra-smooth surfaces processed on various materials, including fused silica, monocrystalline silicon, silicon carbide, and sapphire. To maximize each process’s advantages and achieve higher-quality surfaces, the paper discusses tailored processing methods and iterations for different materials. Finally, the paper anticipates future development trends in response to current challenges in ultra-smooth surface processing technology, providing a systematic reference for the study of the production of large-sized freeform surfaces.

show abstract

Section: Ion Beam Finishingmentioning

confidence: 99%

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Li,

Xin,

Fan

et al. 2024

Micromachines

View full text Add to dashboard Cite

show abstract

“…Fluid jet polishing(FJP) can polish the large aperture optics with high gradient in high accuracy. Elastic emission machine (EEM) and Ion beam figuring( IBF), used in polishing, can remove the workpiece material at the atomic level, and mainly used in profile modification [5,6] . Plasma chemical vaporization machining(PCVM) utilize a chemical reaction to remove material [7].…”

Section: Introductionmentioning

confidence: 99%

The Kinematics Research of Elliptical Vibration Polishing Based on the Vibration Parameter Optimization

Song

Zhao

et al. 2016

KEM

View full text Add to dashboard Cite

Polishing, the last manufacturing procedure in the process of optics manufacturing, has been restricted by the existed contradictory propositions of efficiency and accuracy. As a result, a variety of new combined processing techniques put forward by researchers in many countries. While, elliptical vibration polishing (short as EVP) well considers efficiency and accuracy in machining. This paper focuses on the kinematics research of EVP tools, and proves the superiority of EVP through the vibration parameter optimization. Perfect tool path gets by the impact analysis of phase difference, frequency ratio and amplitude of the polishing tool. Meanwhile the optimum frequency for EVP is studied from the cost and efficiency perspective. The simulations reveal that the perfect tool path will be obtained in the following situations: phase difference at 90°, frequency ratio at 0.909, adjusts the tool vibration amplitude in consideration of minimum curvature radius in polishing area, and appropriately select the vibration frequency.

show abstract

“…So this method is also known as the deterministic polishing technique [3] . Currently, except computer-controlled polishing (CCP), the developing CCOS technology includes many representative technologies, such as the dynamic stressed lap polishing technology, magnetorheological finishing technology [4] , and ion beam polishing technology [5] . The common characteristics of these technologies are a computer-controlled "small grinding tool" polishing on the surface of optical components.…”

mentioning

confidence: 99%

Study of weighted space deconvolution algorithm in computer controlled optical surfacing formation

Zhang

2009

Chin. Opt. Lett.

View full text Add to dashboard Cite

Theoretical and experimental research on the deconvolution algorithm of dwell time in the technology of computer controlled optical surfacing (CCOS) formation is made to get an ultra-smooth surface of space optical element. Based on the Preston equation, the convolution model of CCOS is deduced. Considering the morbidity problem of deconvolution algorithm and the actual situation of CCOS technology, the weighting spatial deconvolution algorithm is presented based on the non-periodic matrix model, which avoids solving morbidity resulting from the noise induced by measurement error. The discrete convolution equation is solved using conjugate gradient iterative method and the workload of iterative calculation in spatial domain is reduced effectively. Considering the edge effect of convolution algorithm, the method adopts a marginal factor to control the edge precision and attains a good effect. The simulated processing test shows that the convergence ratio of processed surface shape error reaches 80%. This algorithm is further verified through an experiment on a numerical control bonnet polishing machine, and an ultrasmooth glass surface with the root-mean-square (RMS) error of 0.0088 µm is achieved. The simulation and experimental results indicate that this algorithm is steady, convergent, and precise, and it can satisfy the solving requirement of actual dwell time.

show abstract

Deterministic Figuring in Optical Machining by Ion Beam

Cited by 6 publications

References 0 publications

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

The Kinematics Research of Elliptical Vibration Polishing Based on the Vibration Parameter Optimization

Study of weighted space deconvolution algorithm in computer controlled optical surfacing formation

Contact Info

Product

Resources

About