2018
DOI: 10.3390/ma11081331
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Determining the Nitrogen Content in (Oxy)Nitride Materials

Abstract: Nitrogen (and also oxygen) determination has become an important parameter to characterize (oxy)nitride materials for many properties and applications. Analyzing such anions with accuracy is still a challenge for some materials. However, to date, a large panel of methodologies is available to answer this issue with relevant results, even for thin films. Carrier gas hot extraction techniques and electron probe microanalysis with wavelength dispersive spectroscopy (EPMA-WDS) look attractive to analyze bulk mater… Show more

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Cited by 23 publications
(17 citation statements)
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“…The chemical composition of the deposited multilayers was determined by the WDS method ( Table 1 ). It is accurate enough for detecting light elements such as N, has a low measurement error of about 1 at.%, and high spectral resolution [ 49 ]. Multilayer coatings had almost the same contents of W and N, except for the WN/CrN one.…”
Section: Resultsmentioning
confidence: 99%
“…The chemical composition of the deposited multilayers was determined by the WDS method ( Table 1 ). It is accurate enough for detecting light elements such as N, has a low measurement error of about 1 at.%, and high spectral resolution [ 49 ]. Multilayer coatings had almost the same contents of W and N, except for the WN/CrN one.…”
Section: Resultsmentioning
confidence: 99%
“…EDX spectroscopy on the recovered samples confirms the presence of oxygen in addition to nitrogen and tin (Figure S4, Supporting Information) without other contamination. Quantification of O and N was not possible as EDX is not reliable for low Z elements …”
Section: Resultsmentioning
confidence: 99%
“…Quantificationo fOa nd Nw as not possible as EDX is not reliable for low Zelements. [8] [a] Dr.S.Bhat, Dr.K. Glazyrin…”
Section: Precursor and Hp-ht Synthesismentioning
confidence: 99%
“…Additionally, nitrogen was quantified using a combustion method. 32) The results of the chemical analysis are shown in the Table 1(a).…”
Section: Viscosity Measurementsmentioning
confidence: 99%