Determining Plasma Potential from RF Measurements Using an Impedance Probe

Abstract

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Measurement of two‐layer medium dielectric property using a novel parameters model in radio frequency

“…If the impedance measurement uncertainty is required to be less than 10%, the impedance of the ring electrodes needs to be designed to fall within 10–200 Ohms (see impedance error of the shunt configuration in fig. 3 of Walker 23 ). For the non‐substrate‐embedded ring electrodes, the characteristic impedance is determined by the structural ratio and the dielectric properties of the medium to be measured.…”