Platinum-coated chromium nitride electrodes are deposited onto gas diffusion layers by normal and glancing angle deposition and are tested as cathodes for proton exchange membrane ͑PEM͒ fuel cells. X-ray diffraction and scanning electron microscopy show that the CrN forms 111-oriented nanoparticles with ͕100͖ facets that are covered by 3.4 ϫ 10 11 Pt mounds/cm 2 , independent of Pt loading 0.05 to 0.25 mg/cm 2 . Polarization curves exhibit dE/d͑log i͒ slopes b Ϸ −100 and Ϫ150 mV/dec for high ͑E Ͼ 0.75 V͒ and low ͑E Ͻ 0.5 V͒ potentials, respectively, but show an anomalous drop with b Ϸ −420 mV/dec in the intermediate voltage range. This is attributed to poor proton conduction associated with a reversible dewetting of electrode pores during low current operation. Quantitative analyses of rate-dependent polarization curves and electrochemical impedance spectra show that the time scale for pore filling by process water is 10 3 s, and that the ionic resistance R C within the electrode increases by a factor of 4, from R C Ϸ 0.2 to 0.8 ⍀ cm 2 , as E increases from 0.5 to 0.8 V. The increasing electrode resistance is attributed to a low water production rate at low current, which allows the relatively hydrophobic CrN to expel water from the electrode pores, resulting in a higher resistance for ionic transport. These results show that even ultrathin sputtered catalyst layers can exhibit incomplete flooding.Proton exchange membrane ͑PEM͒ fuel cells hold much promise for portable and automotive applications due to their high conversion efficiency and power density. 1 One obstacle to the widespread commercialization of fuel cells is the high cost of the platinum catalyst. Therefore, much effort is devoted to replacing or reducing the Pt loading w. 2 Most of today's commercial fuel cells minimize w by using a network of 30-50 nm wide carbon particles that support 2-5 nm wide Pt nanoparticles. 3,4 A challenge associated with this Pt/C approach is a decreasing efficiency and limited lifetime due to sintering and growth of the Pt, 5 peroxide attack of the membrane, 6 and carbon corrosion. 7 Moreover, some reports suggest that the lower limit in reducing Pt loading in this approach has already been reached, as reducing w to below 0.40 and 0.05 mg/cm 2 for cathode and anode, respectively, decreases the output efficiency. 8,9 Considerable efforts have been directed at replacing the precious metal catalyst with other less costly materials. One possible material is CrN, which has a lower activity than Pt, 10 but is an attractive candidate to supplement or replace Pt in lower cost fuel cell electrodes because of its well-known wear and corrosion resistance. 11 Industrial CrN coatings are most commonly deposited by reactive magnetron sputtering. Sputter deposition has also gained interest for Pt catalyst deposition, 2,12-17 as it provides a pathway to fabricate very low Pt loading ͑w = 0.005 mg/cm 2 ͒ 18 electrodes with a high degree of control and reproducibility. We have recently reported that sputtering Pt from highly oblique incide...