2005
DOI: 10.1016/j.surfcoat.2005.08.035
|View full text |Cite
|
Sign up to set email alerts
|

Determination of the neutral gas temperature of nitrogen-containing low-pressure plasmas using a two-temperature model

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
6
0

Year Published

2008
2008
2022
2022

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 16 publications
(6 citation statements)
references
References 26 publications
0
6
0
Order By: Relevance
“…Therefore, the rotational population distribution of N + 2 (B) excited by electron impact usually reflects the gas temperature. In reduced pressure nitrogencontaining discharges, high rotational excitation has been observed and is ascribed to the production of N + 2 (B) by heavy particle collisions, namely vibrational pumping [172,173].…”
Section: Reactionmentioning
confidence: 99%
“…Therefore, the rotational population distribution of N + 2 (B) excited by electron impact usually reflects the gas temperature. In reduced pressure nitrogencontaining discharges, high rotational excitation has been observed and is ascribed to the production of N + 2 (B) by heavy particle collisions, namely vibrational pumping [172,173].…”
Section: Reactionmentioning
confidence: 99%
“…In [27,37], a function with a two-temperature Boltzmann rotational distribution was proposed to fit the FNS bands. However, the function with only one temperature Boltzmann rotational distribution produces a suitable fit on our FNS band spectra.…”
Section: Gas Temperature Measurementioning
confidence: 99%
“…Gas temperature is one of the most important parameters for plasma applications. For discharges with molecular emission bands, such as OH(A-X) and N 2 (C-B), rotational temperatures of these molecules are often applied to estimate the plasma gas temperature by spectra-fitting the experimental emission bands [48,49]. The emission bands of the second positive system of nitrogen N 2 (C 3 u − B 3 g ) at rovibrational transitions at (0-2), (1-3) and (2-4) from 368 to 383 nm are used and simulated by the software Specair to determine the rotational (T rot ) and vibrational (T vib ) temperatures of nitrogen.…”
Section: Global Emission Spectra and Ro-vibrational Temperaturementioning
confidence: 99%