Determination of the Anisotropy of Young's Modulus Using a Coupled Microcantilever Array

Choubey, Bhaskar; Boyd, E.; Armstrong, Ian; Uttamchandani, Deepak

doi:10.1109/jmems.2012.2205137

Cited by 15 publications

(15 citation statements)

References 27 publications

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“…However, all the eigenvalues of the system would decrease due to collective coupling behaviour, and satisfy the following interweaving condition [10]:…”

Section: Perturbation Analysismentioning

confidence: 99%

“…By perturbing the terminal element of a coupled array, two unique sets of eigenvalues are recorded to extract the system matrix using inverse problem theory. The system matrix is associated with important device properties such as Young's modulus [10], mass sensitivity [11] and process variability [12]. However, existing IEA techniques require solving complicated eigenvectors or orthogonal polynomials, and hence become complicated when the array size is large.…”

Section: Introductionmentioning

confidence: 99%

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Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array

Tao

Choubey

2018

Analog Integr Circ Sig Process

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Monitoring the collective behaviour of coupled micro/nano resonators array provides a distinct opportunity for high resolution multi-function sensing. We report an inverse eigenvalue analysis based sensing approach for large array of coupled micro/nano resonators. A new characterization algorithm is proposed to precisely extract the system matrix of those multiplexed sensors with reduced algorithmic complexity and below 1% relative error. The method has been verified experimentally using five corner coupled square plate MEMS resonators with a natural frequency close to 0.85 MHz. The method is also capable of characterizing the fabrication process and important sensor parameters such as the spring constant and coupling ratio.

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“…However, all the eigenvalues of the system would decrease due to collective coupling behaviour, and satisfy the following interweaving condition [10]:…”

Section: Perturbation Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array

Tao

Choubey

2018

Analog Integr Circ Sig Process

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“…[10][11][12][13][14][15][16][17] As the critical issues of mechanical performance of microcantilevers, Young's modulus [18][19][20][21][22][23] and resonant frequency [24][25][26][27][28][29][30][31] have been studied by various characterizations. In this research, atomic force microscopy (AFM) measurement is conducted to characterize resonant frequency of multi-layer microcantilevers, and a theoretical model is proposed and discussed including the impact of coating on both Young's modulus and resonant frequency.…”

confidence: 99%

Young’s modulus of multi-layer microcantilevers

Deng

et al. 2017

AIP Advances

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A theoretical model for calculating the Young’s modulus of multi-layer microcantilevers with a coating is proposed, and validated by a three-dimensional (3D) finite element (FE) model using ANSYS parametric design language (APDL) and atomic force microscopy (AFM) characterization. Compared with typical theoretical models (Rayleigh-Ritz model, Euler-Bernoulli (E-B) beam model and spring mass model), the proposed theoretical model can obtain Young’s modulus of multi-layer microcantilevers more precisely. Also, the influences of coating’s geometric dimensions on Young’s modulus and resonant frequency of microcantilevers are discussed. The thickness of coating has a great influence on Young’s modulus and resonant frequency of multi-layer microcantilevers, and the coating should be considered to calculate Young’s modulus more precisely, especially when fairly thicker coating is employed.

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“…As another approach, one can use piezoelectric forces to just excite the sensor and measure through any other means. For example, Kumar and Bhaskaran utilise changes in resistance to measure resonance while Choubey and co-workers have utilised optical means to measure from the sensor [13]. As the resonators move, high speed imaging or vibrometry can be deployed to measure resonance.…”

Section: Iiiii Actuation and Sensing Mechanismmentioning

confidence: 99%

On Mass Sensing Using Micro/Nano Resonators - Approaches, Challenges And Directions

Choubey

McEwan

2016

International Journal on Smart Sensing and Intelligent Systems

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Micro/Nano electromechanical systems based Mass sensors are being increasingly used for detecting very low masses, with significant applications in bio-sensing as well as environmental sensing. A number of different shapes, excitation mechanisms as well as materials have been suggested for these sensors. In addition, with reducing dimensions due to improvement in fabrication, these sensors have the potential to measure bacterial level masses. This paper reviews some of the research directions in this field. Various sensing and actuation strategies for these resonators are discussed. In addition, three important challenges, which have the potential of providing new directions of research are also explored. These include quality factor, increasing nonlinearity and coupling. Coupling of sensors can provide a unique opportunity to build several resonant sensors on the same chip and reduce the number of contacts required as well as the potential bandwidth

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Determination of the Anisotropy of Young's Modulus Using a Coupled Microcantilever Array

Cited by 15 publications

References 27 publications

Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array

Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array

Young’s modulus of multi-layer microcantilevers

On Mass Sensing Using Micro/Nano Resonators - Approaches, Challenges And Directions

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