2003
DOI: 10.1063/1.1582369
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Determination of the anisotropic dielectric function for wurtzite AlN and GaN by spectroscopic ellipsometry

Abstract: We demonstrate that variable angle spectroscopic ellipsometry (SE) is capable of determining both ordinary and extraordinary dielectric functions (DFs) in the transparent region of group III nitride wurtzite films even if the optical axis is oriented normal to the surface plane. In contrast to the so far used prism coupling technique, the SE method is neither restricted to layers deposited on lower refractive index substrates nor to available laser wavelengths. Application to AlN and GaN films grown on 6H-SiC … Show more

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Cited by 104 publications
(63 citation statements)
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“…An analytical description of the point-by-point fitted Δ 1,⊄ (hω) can be made using the model proposed by Shokhovets et al [64]:…”
Section: B Optical Properties In the Visible-to-ultraviolet Spectralmentioning
confidence: 99%
“…An analytical description of the point-by-point fitted Δ 1,⊄ (hω) can be made using the model proposed by Shokhovets et al [64]:…”
Section: B Optical Properties In the Visible-to-ultraviolet Spectralmentioning
confidence: 99%
“…Because of the anisotropy of the energy position and amplitude of E 1 and E 1 (B), the dispersion of Δ 1 in the visible range is anisotropic as well. It can be modeled by the empirical equation 35 …”
Section: B High-frequency and Static Dielectric Constantsmentioning
confidence: 99%
“…9 Ellipsometry results show unambiguously the absorption onset related with the C 9 valence band. 19 This transition is shown as a function of temperature in Fig. 6 for the Mg doped sample with x ÂŒ 0.733.…”
Section: B Valence Band Splittingmentioning
confidence: 99%