A new model is proposed for the calculation of the electron beam induced barrier current (BC) on surfaces perpendicular to the p‐n junction involving an experimentally obtained electron‐hole pair generation source. The BC profiles computed describe excellently the experimentally found results also for high primary energies of electrons and short diffusion lengths. Especially the part concave from the bottom near the p‐n junction and the ratio of the BC values for various primary energies at constant positions can be explained with the proposed model. The investigation of GaP:N diodes shows the influence of the Zn‐diffusion conditions on the diffusion length in the n‐ and p‐region.