Determination of Stress Tensors in thin textured copper films by grazing incidence diffraction

Abstract

Ion-platted thin copper films were examined for residual stresses and texture by X-ray diffraction. The complete orientation distribution functions were determined and sharp (1 1 1)-fibre textures were found. The strains were measured by grazing incidence diffraction. The stress tensors were calculated using both texture-weighted elastic compliances and texture-independent X-ray elastic constants. The importance of the texture measurement for the stress tensor determination is discussed. The found stresses can be interpreted as thermally induced.

Grazing excidence diffraction versus grazing incidence diffraction for strain/stress evaluation in thin films

“…Residual stress evaluation (RSE) by grazing incidence diffraction has been described by several authors (Segmuller and Murakami, 1985;Van Acker et al, 1994;Wieder, 1995b;Fewster, 1996). We applied the method of our previous work (Zendehroud et al, 1993(Zendehroud et al, , 1995. The idea is to include as many as accessible reflections into the evaluation.…”

“…Our idea was to examine whether GEXD is less sensitive to alignment errors, in par-ticular with respect to Ar. We tested GEXD for RSE whereas the RSE was carried out according to the method described in Wieder (1995a) and Zendehroud et al (1995).…”