Determination of piezoelectric coefficients and elastic constant of thin films by laser scanning vibrometry techniques

Huang, Zhaorong; Leighton, Glenn J. T.; Wright, Robert V.; Duval, Fabrice; Chung, Hsien-Chun; Kirby, Paul B.; Whatmore, R. W.

doi:10.1016/j.sna.2006.10.002

Cited by 26 publications

(14 citation statements)

References 20 publications

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“…Resulting d 33 values are normally lower than in the corresponding bulk 12. Furthermore, effective d 33 values are dependent on the extent of the substrate rigidity 25–27…”

Section: Methodsmentioning

confidence: 96%

A New Material for High‐Temperature Lead‐Free Actuators

Kuršumović

Defaÿ

Lee

et al. 2013

Adv Funct Materials

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“…Resulting d 33 values are normally lower than in the corresponding bulk 12. Furthermore, effective d 33 values are dependent on the extent of the substrate rigidity 25–27…”

Section: Methodsmentioning

confidence: 96%

A New Material for High‐Temperature Lead‐Free Actuators

Kuršumović

Defaÿ

Lee

et al. 2013

Adv Funct Materials

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“…Working with these structures, the properties of the piezoelectric materials were determined by analyzing static deformations [6] to [8] and resonance frequency shifts [7] and [9]. Dynamic responses were also used to characterize piezoelectric materials, often at very low frequencies to avoid large amplitude oscillations associated with resonance and the potential nonlinear behavior which may result [9] to [12].…”

Section: Introductionmentioning

confidence: 99%

Characterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonators

Dick

2013

SV-JME

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“…Displacement distribution of the structured surface ( Fig. 1) along the centreline of the free and clamped actuators was measured in a ±0.5 V/µm electric field at 10 Hz frequency using a fibre-optic laser vibrometer OFV-5000 (Polytec GmbH, Germany) and XY-table [16,17]. Additionally, displacement at the centre of the free gradient actuators was measured from ±0.1 V/µm to ±0.5 V/µm electric fields at 10 Hz frequency under applied weights up to 18.8 g. Stiffness of a PZT 5H bulk disc and micromachined actuators was measured utilising the measurement system presented by Juuti et al [15].…”

Section: Methodsmentioning

confidence: 99%

Electromechanical performance of structurally graded monolithic piezoelectric actuator

et al. 2008

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In this paper, the effect of structural gradients in monolithic piezoelectric actuators is investigated. Different cross-section profiles were micro-machined with a laser into commercial PZT 5H bulk discs with thicknesses of 375 µm and 500 µm (∅ 25 mm). Profiles and curvatures of the actuators were measured which showed both concave and convex structures, thus indicating pre-stress of the actuators. After poling, the distribution of out-of-plane displacement was scanned by a fibre-optic laser vibrometer. Maximum displacements of ∼6.3 µm and ∼24.8 µm were obtained from a freely moving and clamped ∼375 µm thick actuator, respectively, in a ±0.5 V/µm electric field at 10 Hz frequency without load. Furthermore, deflection in the centre of the actuators was measured up to 184 mN load using the same electric field and frequency. Bending of the bulk actuators without any additional layer was a consequence of the gradient in poling and driving electric field via thickness variation of the material. Hence, different regions produced strain distribution and bending in a similar fashion to other benders. Actuators with the highest arch height exhibited the highest displacement and load bearing capabilities derived from the increased area moment of inertia and enhanced piezoelectric response due to pre-stress. The results show that the monolithic bending actuators can be realised by simple structural designing of the actuator. Such structural gradients can be one reason contributing to the higher displacement of RAINBOW actuators compared to other pre-stressed actuators. In a further development, the structural gradients can be utilized in high displacement pre-stressed actuators and in miniaturized monolithic piezoelectric devices.

show abstract

Determination of piezoelectric coefficients and elastic constant of thin films by laser scanning vibrometry techniques

Cited by 26 publications

References 20 publications

A New Material for High‐Temperature Lead‐Free Actuators

A New Material for High‐Temperature Lead‐Free Actuators

Characterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonators

Electromechanical performance of structurally graded monolithic piezoelectric actuator

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