Determination of nanomaterials’ film thickness using filmetrics F40-UV thin-film analyzer; Standard Operating Procedure Series : Characterization (C)

Abstract

Optical measurement techniques have been widely used for the determination of thin film thicknesses and optical constants. This standard operating procedure (SOP) presents a specific protocol for the determination of nanomaterial thin-film thicknesses and their optical constants-including the refractive index (RI) and the extinction coefficient-using a Filmetrics F40-UV Thin Film Analyzer. Procedures and recommendations of instrument preparation and parameters, sample measurement, and results analysis are included. The procedure applies to a wide range of nanomaterial thin films in the thickness range from approximately 4 nm to 25 µm. DISCLAIMER: The contents of this report are not to be used for advertising, publication, or promotional purposes. Citation of trade names does not constitute an official endorsement or approval of the use of such commercial products. All product names and trademarks cited are the property of their respective owners. The findings of this report are not to be construed as an official Department of the Army position unless so designated by other authorized documents.