The determination of isotope ratios in individual uranium particles is very important for nuclear safeguards. In this work, accelerator mass spectrometry (AMS), thermal ionization mass spectrometry (TIMS), and secondary ion mass spectrometry (SIMS) were applied to isotope ratio analysis of individual uranium particles and compared in terms of background, measurement accuracy, and efficiency. Several individual uranium particles (1-7 μm) from certified reference materials were used as samples. The results show that the average values of blank counting rate of 235 U for AMS, FT-TIMS (FT: fission track), SEM-TIMS (SEM: scanning electron microscope),