2004
DOI: 10.1016/j.tsf.2004.08.157
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Determination of mechanical properties of graded coatings using nanoindentation

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Cited by 35 publications
(18 citation statements)
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“…A variety of techniques have been employed to measure the elastic constants of thin films, for example, tensile test [7][8][9], substrate curvature technique [10][11][12][13], bulge test [14][15][16][17], microbeam bending or deflection technique [18,19], nanoindentation (NIP) [20][21][22][23][24][25][26][27], resonant ultrasound spectroscopy [28][29][30], surface guided wave technique [31][32][33], X-ray diffraction (XRD) technique [34,35], combination of 2 sin ψ X-ray diffraction and laser curvature methods [36,37], combination of acoustic microscopy and nanoindentation method [38,39]. Among the above-mentioned methods, it is available in a few cases that the methods are able to simultaneously determine the Poisson's ratio and Young's modulus of elasticity for functional thin films and thin film structures, but usually either Poisson's ratio or modulus of elasticity should be assumed a priori for determining the other one.…”
Section: Introductionmentioning
confidence: 99%
“…A variety of techniques have been employed to measure the elastic constants of thin films, for example, tensile test [7][8][9], substrate curvature technique [10][11][12][13], bulge test [14][15][16][17], microbeam bending or deflection technique [18,19], nanoindentation (NIP) [20][21][22][23][24][25][26][27], resonant ultrasound spectroscopy [28][29][30], surface guided wave technique [31][32][33], X-ray diffraction (XRD) technique [34,35], combination of 2 sin ψ X-ray diffraction and laser curvature methods [36,37], combination of acoustic microscopy and nanoindentation method [38,39]. Among the above-mentioned methods, it is available in a few cases that the methods are able to simultaneously determine the Poisson's ratio and Young's modulus of elasticity for functional thin films and thin film structures, but usually either Poisson's ratio or modulus of elasticity should be assumed a priori for determining the other one.…”
Section: Introductionmentioning
confidence: 99%
“…Nanoindentation tests are performed to accurately measure the materials properties of the substrate and coatings, taking into account possible property profiles [38,39].…”
Section: The Procedures and Resultsmentioning
confidence: 99%
“…Darum dürfen die Versuche nur mit sehr geringen Lasten, im Mittel 50 mN, gefahren werden, so dass der Einfluss des Substrates gegen Null geht, auch wenn er nie ganz Null sein wird. Die eindeutige Trennung erfordert aber Simulationen der experimentellen Tests mittels FEM [5].…”
Section: Modellierung Von Beanspruchung Und Schädigungsmechanismenunclassified