“…A variety of techniques have been employed to measure the elastic constants of thin films, for example, tensile test [7][8][9], substrate curvature technique [10][11][12][13], bulge test [14][15][16][17], microbeam bending or deflection technique [18,19], nanoindentation (NIP) [20][21][22][23][24][25][26][27], resonant ultrasound spectroscopy [28][29][30], surface guided wave technique [31][32][33], X-ray diffraction (XRD) technique [34,35], combination of 2 sin ψ X-ray diffraction and laser curvature methods [36,37], combination of acoustic microscopy and nanoindentation method [38,39]. Among the above-mentioned methods, it is available in a few cases that the methods are able to simultaneously determine the Poisson's ratio and Young's modulus of elasticity for functional thin films and thin film structures, but usually either Poisson's ratio or modulus of elasticity should be assumed a priori for determining the other one.…”