Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests

Tinoco, Héctor A.; Holzer, Jakub; Pikálek, Tomáš; Buchta, Zdeněk; Lazar, Josef; Chlupová, Alice; Kruml, Tomáš; Hutař, Pavel

doi:10.1016/j.tsf.2018.12.039

Cited by 9 publications

(6 citation statements)

References 22 publications

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“…In bulge tests, the mechanical properties of the thin film can be obtained from the relationship between the imposed uniform pressure and the corresponding out-of-plane deflection of the bulged film. The out-of-plane deflection can be measured via optical microscopy with a calibrated vertical displacement, laser interferometry, and other techniques [212][213][214]. The measured curvature of the bulged membrane, which is equivalent to the out-of-plane deflection, can be used to analyze the stress.…”

Section: Bulge Testingmentioning

confidence: 99%

Mechanical testing of two-dimensional materials: a brief review

Al-Quraishi

Kauppila

et al. 2020

International Journal of Smart and Nano Materials

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Two-dimensional (2D) materials have dominated nanoscience for the last two decades. Among all 2D materials, graphene, MoS 2 , and h-BN are extremely popular and have been tentatively scaled up to fabricate nanocomposites, energy storage devices, flexible electronics, etc., ex situ and in situ mechanical characterization of 2D crystals can help us understand their mechanical behavior and measure their mechanical properties, which are of great significance in both fundamental science and practical engineering. To date, a great effort has been devoted to both theoretical and experimental mechanics with a focus on unveiling mechanical behaviors and quantifying mechanical properties. Beyond original research, several insightful review works have been published with a specific focus on the mechanics of 2D materials. To have a complementary contribution to the overview of the mechanics of 2D materials, we would like to review the developed experimental techniques being used to mechanically characterize 2D materials. The working mechanism and associated advantages and disadvantages of the techniques will be briefly discussed. Based on the existence of arguments in mechanical properties and behaviors of 2D crystals, and immature mechanical characterization of 2D materials, more intensive and comprehensive studies are expected toward a full understanding of these novel and promising materials.

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Section: Bulge Testingmentioning

confidence: 99%

Mechanical testing of two-dimensional materials: a brief review

Al-Quraishi

Kauppila

et al. 2020

International Journal of Smart and Nano Materials

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“…The curve demonstrates that the film's deflection follows a third-order equation over time, given by the following equation hðtÞ ¼ 0; 0004t 3 À 0; 0145t 2 þ 0; 4592t À 0; 0348 (4) where…”

Section: Resultsmentioning

confidence: 99%

“…The resulting deformation is measured and used to calculate the material's mechanical properties, including its elastic modulus and tensile strength. 4 For many years, the bulge test has gained significant attention from both academia and industry as an effective and simple technique to characterize materials subjected to a biaxial stress state. Unlike uniaxial testing, the bulge test offers several advantages.…”

Section: Introductionmentioning

confidence: 99%

“…This is due to the limited dimensions of these structures, which prevent using standardized tests typically used for bulk specimens. 4,[9][10][11][12] Bulge test is widely used in industries such as microelectronics, where thin films are commonly used to manufacture electronic devices, nano-devices, coating applications, and biomedical devices, where the properties of soft tissues and biomaterials are of interest. 9,[13][14][15] Bulge test was also used to investigate the plastic behavior of metallic sheets to understand their formability or to obtain model parameters for predicting thermoforming behavior of plastic or metallic sheets.…”

Section: Introductionmentioning

confidence: 99%

“…The resulting deformation is measured and used to calculate the material’s mechanical properties, including its elastic modulus and tensile strength. 4

Figure 1.Principle of the bulge test.…”

Section: Introductionmentioning

confidence: 99%

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Application of the bulge test combined with 3D-DIC for biaxial characterization of PLA films and defect detection

Kharrat,

Khlif,

Hilliou

et al. 2023

Journal of Plastic Film & Sheeting

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The bulge test is a versatile mechanical testing technique widely applied in materials science, engineering, and biomedical research to understand the mechanical behavior of materials and structures. In this study, PLA blown films were characterized through the bulge test, and the corresponding properties were compared to those obtained from uniaxial t!esting. To achieve more accurate and precise deformation measurements, 3D digital image correlation (3D-DIC) was used, offering superior capabilities in terms of accuracy, precision, and non-destructive testing. This technique can detect defects such as cracks, voids, and delamination in materials and structures. During the bulge testing, 3D-DIC was utilized to analyze the strain field evolution within the test sample and identify regions of reduced film thickness. Notably, the results indicated zones with strain concentration aligned parallel to the film machine direction, suggesting localized thickness reduction in those areas.

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