Y17Co83 and Gd17Co83 (at. %) alloy thin films are prepared on Cu(111) underlayers epitaxially grown on MgO(111) substrates at a substrate temperature of 500 °C by molecular beam epitaxy. The growth behavior and the film structure are investigated by in-situ reflection high-energy electron diffraction and X-ray diffraction. YCo5 and GdCo5 ordered alloy crystals epitaxially grow on the Cu underlayers. The epitaxial films consist of two (0001)