2019
DOI: 10.1016/j.jqsrt.2018.11.026
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Determination of complex refractive index of SU-8 by Kramers–Kronig dispersion relation method at the wavelength range 2.5–22.0 µm

Abstract: This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. Highlights Determination of complex refractive in… Show more

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Cited by 12 publications
(5 citation statements)
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“…Here, the SU-8 layer was used not only to serve as an IR-transparent dielectric spacer through which the light can transmit at a wavelength of 3–10 μm but also to be thinly spin-coated in the submicrometer range (i.e., <600 nm thick). , The minimum achievable thickness of the SU-8 layer was approximately 150 nm which is at least 26-fold thinner than that of other dielectric materials such as Ecoflex (i.e., >4 μm thick) using a diluent thinning agent such as SU-8 2000 Thinner (MicroChem, Inc.) and Thinning Ecoflex Silicones (Smooth-on, Inc.), respectively (Figure S2a). Therefore, the IR filters using an SU-8 dielectric spacer enabled advances in providing a stable transmission spectrum over the counterpart using an Ecoflex dielectric spacer (Figure S2b) despite their similar optical transparency in an IR regime (Figure S2c).…”
Section: Resultsmentioning
confidence: 99%
“…Here, the SU-8 layer was used not only to serve as an IR-transparent dielectric spacer through which the light can transmit at a wavelength of 3–10 μm but also to be thinly spin-coated in the submicrometer range (i.e., <600 nm thick). , The minimum achievable thickness of the SU-8 layer was approximately 150 nm which is at least 26-fold thinner than that of other dielectric materials such as Ecoflex (i.e., >4 μm thick) using a diluent thinning agent such as SU-8 2000 Thinner (MicroChem, Inc.) and Thinning Ecoflex Silicones (Smooth-on, Inc.), respectively (Figure S2a). Therefore, the IR filters using an SU-8 dielectric spacer enabled advances in providing a stable transmission spectrum over the counterpart using an Ecoflex dielectric spacer (Figure S2b) despite their similar optical transparency in an IR regime (Figure S2c).…”
Section: Resultsmentioning
confidence: 99%
“…We used 10 µm thick SU-8 photoresist for rapid prototyping in the present study. This diminished the optical throughput and image quality somewhat due to SU-8 having a slightly larger refractive index than glass (~1.6 vs. 1.5) [34]. Future devices will be fabricated using a 3D glass printer to achieve optimal optics and thus improve dual color imaging [35].…”
Section: Discussionmentioning
confidence: 99%
“…2d) follows that of the THz pump pulse, which suggests no resonance exists in this frequency range. Using optical parameters determined by previous studies on SU-8 [49,50], we calculated the spectrally resolved 𝜒𝜒 (3) (Fig. 2e).…”
Section: Probing Vibrational Resonance In Thin Filmsmentioning
confidence: 99%