Deterioration of junction performance with temperature effect for 45 nm Si-capping MOSFETs on &amp;#x003C;110&amp;#x003E; silicon substrate

Wang, Mu‐Chun; Hu, You-Ming; Lin, Long-Sian; Chen, Shuang-Yuan; Liao, Wen‐Shiang; Yang, Hsin-Chia; Yang, Ren-Hau; Peng, Ssu-Hao

doi:10.1109/inec.2011.5991639

The 4th IEEE International NanoElectronics Conference 2011

DOI: 10.1109/inec.2011.5991639

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Deterioration of junction performance with temperature effect for 45 nm Si-capping MOSFETs on <110> silicon substrate

Mu‐Chun Wang

You-Ming Hu

Long-Sian Lin

et al.

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Deterioration of junction performance with temperature effect for 45 nm Si-capping MOSFETs on <110> silicon substrate

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