2013
DOI: 10.1021/jp4068119
|View full text |Cite
|
Sign up to set email alerts
|

Detection of Two Highly Stable Silicon Nitrides: HSiNSi and H3SiNSi

Abstract: The formation mechanisms of silicon nitride and silicon nitrogen hydrogen films, both produced by chemical vapor deposition (CVD) techniques and widely used in electronic device fabrication, are poorly understood. Identification of gas-phase intermediates formed from starting materials, typically silane, ammonia, and/or nitrogen, is a critical step in assessing the interplay between gas and surface processes in film formation. Two potential intermediates in this process, HSiNSi and H3SiNSi, have now been detec… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
9
0

Year Published

2014
2014
2024
2024

Publication Types

Select...
8
1
1

Relationship

5
5

Authors

Journals

citations
Cited by 16 publications
(9 citation statements)
references
References 52 publications
0
9
0
Order By: Relevance
“…Support for this line of reasoning is provided by the recent detections of HSiNSi and H 3 SiNSi [55], HSiNH 2 [56], HCCNSi, and NCNSi [57] by this approach. Because the chemistry of SiN compounds is exceedingly rich [58], with many possible isomeric Downloaded by [New York University] at 20:17 04 July 2015 forms, it would be disappointing if other such species cannot be detected and characterised spectroscopically in the radio band in the near future.…”
Section: Discussionmentioning
confidence: 95%
“…Support for this line of reasoning is provided by the recent detections of HSiNSi and H 3 SiNSi [55], HSiNH 2 [56], HCCNSi, and NCNSi [57] by this approach. Because the chemistry of SiN compounds is exceedingly rich [58], with many possible isomeric Downloaded by [New York University] at 20:17 04 July 2015 forms, it would be disappointing if other such species cannot be detected and characterised spectroscopically in the radio band in the near future.…”
Section: Discussionmentioning
confidence: 95%
“…It operates from 5 to 42 GHz, but higher-frequency transitions can often be detected using double resonance (DR) spectroscopy (Jäger & Gerry 1995;Sumiyoshi et al 2005). In this type of experiment (Crabtree et al 2013), the intensity of a line that falls in the operating band of the cavity spectrometer is monitored as a second radiation source is swept in frequency. Normally, this second source propagates perpendicular to the axis of the Fabry-Perot cavity, typically near the beam waist.…”
Section: Methodsmentioning
confidence: 99%
“…Because these tools are empirical and unbiased, taken together they can be used to identify highly abundant molecules that have never been the subject of prior experimental or theoretical study. Examples include HNSiN, H 3 NSiN, 102 and HC 4 C(O)H, 103 among others. A recent MST analysis of the discharge chemistry starting from diacetylene and carbon disulfide, for example, resulted in the detection and assignment of more than 85 unique variants, including several new isotopic species and more than 25 new vibrationally excited states of C 2 S, C 3 S, and C 4 S. 104 Perhaps the best illustration of these techniques and one of direct relevance to hydrocarbon chemistry is our recent analysis of a relatively simple system -an electrical discharge of benzene (C 6 H 6 ) alone 105 or in combination with molecular oxygen or nitrogen.…”
Section: Exhaustive Complex Mixture Analysismentioning
confidence: 99%