Detection of trace water in phosphine with cavity ring-down spectroscopy

Cavity-enhanced optical frequency comb spectroscopy in the mid-infrared application to trace detection of hydrogen peroxide

“…It has been successfully applied to issues of fundamental scientific importance and serves as the backbone for numerous applications in physics, chemistry, and biology. These applications include control of manufacturing processes [1][2][3], detection of poisonous gasses or explosives [4,5], human breath analysis for medical applications [6][7][8][9], environmental monitoring [10][11][12][13], and optical methods of 14 C dating [14]. Laser spectroscopy also provides high-resolution and precision laboratory data essential for satellite remote sensing of planetary atmospheres and for monitoring of climate changes in the Earth's atmosphere [15].…”

Analysis of trace impurities in semiconductor gas via cavity-enhanced direct frequency comb spectroscopy

“…switching times could be significantly reduced, resulting in an estimated acquisition time of ~15 minutes per individual spectrum (~2.5 hours for the full bandwidth) to achieve the current sensitivity. In addition, a carefully designed system using two separate cavities (one for sample gas and one for reference gas) can reduce common-mode amplitude 1 A detailed spectrum is available at: http://jila.colorado.edu/yelabs/pubs/scienceArticles/2010/ImpurityCylinderSpectrum.pdf noise and would require no gas switching, thus improving sensitivity and further reducing the required acquisition time.…”

“…Arsine (AsH 3 ) and phosphine (PH 3 ) are important process gases used in the production of III-V semiconductors via metal organic chemical vapor deposition (MOCVD) [1][2][3][4]. These compounds are used in devices ranging from high-brightness light emitting diodes and high power laser diodes to solar cells.…”

Optimal spectral region for real-time monitoring of sub-ppm levels of water in phosphine by cavity ring-down spectroscopy

“…To date, we have measured water concentrations in PH 3 at the CRDS system at 5907160 nmol mol À1 (ppb), 18.071.5 mmol mol À1 (ppm), and 730760 mmol mol À1 (ppm), for three different gas cylinders. We note that the first of these measurements probably included water vapor desorbing from the gas system walls, and the last was from a cylinder that was kept in use for 3 years beyond its recommended shelf life [1].…”

“…In previous work [1], we have used phosphine (PH 3 ) characterized by CRDS measurements in the gas-source molecular beam epitaxial growth of AlInP to correlate the materials properties with moisture contamination. The O concentration in the AlInP measured by SIMS and photoresponse measured with current-voltage properties under illumination both were relatively insensitive to an increased level of water vapor contamination in the source PH 3 , possibly because of the absence of reactive organometallic compounds in the growth chamber.…”