Amorphous (a-) oxides form an important category
of transparent conducting/semiconducting thin films used as electrodes
and channel layers in thin film transistors. The compositional flexibility
of amorphous states, through doping, makes it possible to fine-tune
the electrical properties of films from conducting to semiconducting.
However, surface chemistry and stability of these films are rarely
addressed. Surface studies of amorphous materials, in general, are
scarce due to disorder. Here, long-term surface stability of a–Zn–Sn–O films was investigated using
grazing incidence X-ray absorption spectroscopy techniques. We present
a detailed description of film surface structures and their evolution
over time. It was found that the surface structure is, locally, a
close analogue of the crystalline counterpart and that surface chemistry
is governed by vacancies, strain, composition, and film density. It
is shown that the long-term stability of a film is questionable when
the film has a high Zn content and a low density.