Detection and repair of multiphase defects on alternating phase-shift masks for DUV lithography

Abstract

Alternating Phase-Shift Mask (Alt-PSM) is one of the key technologies for O.l5pm or below rule device fabrication. But it is not yet widely utilized because of difficulty on phase controllability and defect controllability. Through more than 7 years at our commercial base operation and feedback from customers, we have improved our Alt-PSM both on its performance on wafer resist image and defect minimization.We have focused on the two elements, defects detection and repair, that made it difficult to control defect quantity on Alt-PSMs. In this paper, we describe results of experiment and optimization method that aims to assure zero defect on Alt-PSM for DUV lithography.We prepared evaluation plates. The plates contain series of programmed quartz defect on O.6pm line & space, each has phase errors of 60, 120 and 1 80 degrees at KrF wavelength. We used several latest models of inspection tools to evaluate phase shift quartz defect detectability, which are KLA353UV, STARlight, 9MD84SR(i). Micrion8000 was used as the repair tool. MSM-lOO/AIMS was used to evaluate wafer CD error ofdefect area before and after repair.As results, we found that inspection by short wavelength, especially by 9MD845R(i), was effective for detection of phase shift defects, and that if this method were combined with STARlight inspection, detectability ofthe phase shift defect would be improved. With combination of this inspection method and our FIB repair, which is optimized for pre-measured height of each phase shift defect by use of AFM, we would be able to supply zero defect Alt-PSMs for O.l5pm design rule devices.

<title>Alternating PSM phase defect printability for 100-nm KrF lithography</title>

“…2 Dimensional simulation was compared to 3 Dimensional Electro-Magnetic Field simulation for the printability of phase bump defects and divot defects. 4. Based on verified defect simulation for '-4 :3 duty ratio test patterns, printable phase defects for denser pattern were predicted.…”